전자공학회논문지 IE

대한전자공학회 (The Institute of Electronics and Information Engineers)
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LB법으로 제작한 MIM 구조 유기 박막의 전자특성

Electronic Properties of MIM Structure Organic Thin-films that Manufacture by LB method

  • 최영일 (조선이공대학 메카트로닉스과) ;
  • 이경섭 (동신대학교 전기공학과) ;
  • 임중열 (남부대학교 디지털정보과) ;
  • 송진원 (한국기계연구원 나노공정장비연구센터)
  • Choi, Young-Il (Dept. of Mechatronics, Chosun College of Science & Technology) ;
  • Lee, Kyung-Sup (Dept. of Electrical Eng., Dongshin University) ;
  • Lim, Jung-Yeol (Dept. of Digital information, Nambu University) ;
  • Song, Jin-Won (Dept. of Nanomecanical System Research Center, Korea Institute of Machinery & Materials)
  • 발행 : 2006.12.25
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초록

전기 전자 소자를 제작하는 방법으로 Langmuir-Boldgett(LB)법이 많은 관심을 받고 있다. 수면위에 형성된 단분자막을 압축 또는 확장하면, 분자가 배향하는 과정에서 맥스웰 변위전류(MDC)가 흐른다. MDC는 전속밀도의 변화에 기인해서 흐르므로 MDC를 측정하는 것에 의해 분자의 동적 거동 관찰할 수 있다. 단분자막을 압축하는 속도와 분자면적은 서로 선형적인 관계를 갖고 있다. 본 연구에서는 압축속도를 30, 40, 50mm/min으로 달리하여 단분자막의 동적 거동을 관찰하였으며 LB법을 이용하여 Arachidic acid 단분자를 slide glass 위에 Y-type으로 9$\sim$21층의 다층막을 누적하여 Au/Arachidic acid/Al 소자를 제작하였다. 또한 Metal-Insulator-Metal(MIM) 소자의 I-V 특성을 측정하여 전극간의 거리가 커질수록 절연특성이 좋아짐을 확인하였다.

The Langmuir-Blodgett(LB) technique has attracted considerable interest in the fabrication of electrical and electronic devices. Maxwell displacement current (MDC) measurement has been employed to study the dielectric property of Langmuir-films. MDC flowing across monolayers is analyzed using a rod-like molecular model. A linear relationship between the monolayer compression speed u and the molecular area Am. Compression speed a was about 30, 40, 50mm/min. Langmuir-Blodgett(LB)layers of Arachidic acid deposited by LB method were deposited onto slide glass as Y-type film. The structure of manufactured device is Au/Arachidic acid/Al, the number of accumulated layers are 9$\sim$21. Also, we then examined of the Metal-Insulator-Metal(MIM) device by means of I-V. The I-V characteristics of the device are measured from -3 to +3[V]. The insulation property of a thin film is better as the distance between electrodes is larger.

키워드

참고문헌

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