Korean Journal of Optics and Photonics (한국광학회지)

Optical Society of Korea (한국광학회)
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Structural, Optical and Photocatalyst Property of Copper-doped TiO2 Thin Films by RF Magnetron Co-sputtering

동시 스퍼터링법을 이용하여 Cu 도핑한 TiO2 박막의 구조적, 광학적 및 광분해 특성

  • Published : 2006.02.01
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Abstract

Cu-doped $TiO_2$ thin films were prepared by RF magnetron co-sputtering, and their structural, optical and photodegradation. properties were examined as a function of calcination temperature. XRD results showed that the crystallite size of Cu/$TiO_2$ thin films was bigger than that of the pure $TiO_2$ thin films. SEM results revealed that the agglomerated particle size of the Cu/$TiO_2$ films was more uniform and smaller than that of pure $TiO_2$ films. The absorption edge of thin films calcined at $900^{\circ}C$ was red shifted, resulting from the phase transformation from anatase to rutile phase, and the transmittance of the thin film rapidly decreased due to an increase in particle size. The photodegradation properties of the Cu/$TiO_2$ thin films were superior to those of the pure $TiO_2$ thin films.

동시 스퍼터링법으로 $TiO_2$ 박막과 구리를 도핑한 Cu/$TiO_2$ 박막을 제작하고, 금속의 도핑과 열처리 온도에 따른 구조적, 광학적, 광분해 특성을 조사하였다. XRD 측정 결과 구리 도핑의 경우에 입자의 결정 크기가 증가하였으며, SEM 결과 입자들의 크기가 균일하고 입자들의 뭉침이 더 작은 것을 확인 할 수 있었다. $900^{\circ}C$에서 열처리한 박막의 흡수단은 아나타제에서 루타일로의 상전이에 의해 밴드갭의 변화로 장파장 영역으로 이동하였고, 또한 입자 크기 증가에 따라 투과율이 급격히 감소하였다. Cu/$TiO_2$ 박막들은 순수$TiO_2$ 박막보다 광분해 특성이 더 우수하였다.

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References

  1. W. Zhang, Y. Li, S. Zhu, F. Wang, 'Influence of argon flow rate on TiO$_2$ photocatalyst film deposited by dc reactive magnetron sputtering,' Surf. Coat. Technol., vol. 182, pp. 192-198, 2004 https://doi.org/10.1016/j.surfcoat.2003.08.050
  2. K. D. Rogers, D. W. Lane, J. D. Painter, A. Chapman, 'Structural characterization of sprayed TiO$_2$ films for extremely thin absorber layer solar cells,' Thin Solid Films, vol. 466, pp. 97-102, 2004 https://doi.org/10.1016/j.tsf.2004.02.023
  3. C. Martinet, V. Paillard, A. Gagnaire, J. Joseph, 'Deposition of SiO$_2$ and TiO$_2$ thin films by plasma enhanced chemical vapor deposition for antireflection coating,' J. Non-Cryst. Solids, vol. 216, pp. 77-82, 1997 https://doi.org/10.1016/S0022-3093(97)00175-0
  4. I. Hayakawa, Y. Iwamoto, K. Kikuta, S. Hirano, 'Gas sensing properties of platinum dispersed- TiO$_2$ thin film derived from precursor,' Sen. and Actuators, vol. B62, pp. 55-60, 2000
  5. Yu. V. Kolen'ko, B. R. Churagulov, M. Kunst, L. Mazerolles, C. Colbeau-Justin, 'Photocatalytic properties of titania powders prepared by hydrothermal method,' Appl. Catal., vol. B 54, pp. 51-58, 2004
  6. M. Yamagishi, S. Kuriki, P. K. Song, Y. Shigesato, 'Thin film TiO$_2$ photocatalyst deposited by reactive magnetron sputtering,' Thin Solid Films, vol. 442, pp. 227-231, 2003 https://doi.org/10.1016/S0040-6090(03)00987-8
  7. A. Bendavida, P. J. Martina, H. Takikawa, 'Deposition and modification of titanium dioxide thin films by filtered arc deposition,' Thin Solid Films, vol, 360, pp. 241-249, 2002 https://doi.org/10.1016/S0040-6090(99)00937-2
  8. S. K. Zheng, G. Xiang, T. M. Wang, F. Pan, C. Wang, W. C. Hao, 'Photocatalytic activity studies of TiO$_2$ thin films prepared by r.f magnetron reactive sputtering,' Vacuum, vol. 72, pp. 79-84, 2004 https://doi.org/10.1016/S0042-207X(03)00104-0
  9. L. Sun, P. Hou, 'Spectroscopic ellipsometry study on e-beam deposited titanium dioxide films,' Thin Solid Films, vol. 455-456, pp. 525-529, 2004
  10. R. S. Sonawane, S. G. Hegde, M. K Dongare, 'Preparation of titanium(IV) oxide thin film photocatalyst by sol - gel dip coating,' Mater. Chem. Phys., vol. 77, pp. 744-750, 2003 https://doi.org/10.1016/S0254-0584(02)00138-4
  11. T. N. Murakami, Y. Kijitori, N. Kawashima, T. Miyasaka, 'Low temperature preparation of mesoporous TiO$_2$ films for efficient dye-sensitized photoelectrode by chemical vapor deposition combined with UV light irradiation,' J. Photochem. Photobiol., vol. A 164, pp. 187-191, 2004
  12. W. Zhang, Y. Li, S. Zhua, F. Wang, 'Copper doping in titanium oxide catalyst film prepared by de reactive magnetron sputtering,' Catal. Today, vol. 93-95, pp. 589-594, 2004
  13. J. W. Yoon, T. Sasaki, N. Koshizaki, E. Traversa, 'Preparation and characterization of M/TiO$_2$(M = Ag, Au, Pt) nanocomposite thin films,' Scripta Mater. vol. 44, pp. 1865-1868, 2001 https://doi.org/10.1016/S1359-6462(01)00732-1
  14. Y. Hu, C. Yuan, 'Low-temperature preparation of photocatalytic TiO$_2$ thin films from anatase sols,' J. Cryst. Growth, vol. 274, pp. 563-568, 2005 https://doi.org/10.1016/j.jcrysgro.2004.10.146
  15. T. Surnita, H. Otsuka, H. Kubota, M. Nagata, Y. Honda, R. Miyagawa, T. Tsurushima, T. Sadoh, 'Ion-beam modification of TiO$_2$ film to multilayered photocatalyst,' Nucl. Instr. and Meth., vol. B 148, pp. 758-761, 1999
  16. M. S. Zhang, J. Yu, J. Chu, Q. Chen, W. Chen, 'Microstructures and photoluminescence of barium titanate nanocrystals synthesized by the hydrothermal process,' J. Mater. Process. Technol., vol. 137, pp. 78-81, 2003 https://doi.org/10.1016/S0924-0136(02)01071-3
  17. T. Hamaguchi, M. Uno, S. Yamanaka, 'Photocatalytic activity of titania nanohole arrays,' J. Photochem. Photobiol., vol. A 173, pp. 99-105, 2005
  18. Y. Q. Hou, D. M. Zhuang, G. Zhang, M. Zhao, M. S. Wu, 'Influence of annealing temperature on the properties of titanium oxide thin film,' Appl. Surf. Sci., vol. 218, pp. 97-105, 2003
  19. S. W. Ryu, E. J. Kim, S. K. Ko and S. H. Hahn, 'Effect of calcination on the structural and optical properties of M/TiO$_2$ thin films by RF magnetron co-sputtering,' Materials Letters, vol. 58, pp. 582-587, 2004 https://doi.org/10.1016/S0167-577X(03)00566-4
  20. S. K. Zheng, T. M. Wang, G. Xiang, C. Wang, 'Photocatalytic activity of nanostructured TiO$_2$ thin films prepared by dc magnetron sputtering method,' Vacuum, vol. 62, pp. 361-366, 2001 https://doi.org/10.1016/S0042-207X(01)00353-0