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http://dx.doi.org/10.3807/KJOP.2006.17.1.104

Structural, Optical and Photocatalyst Property of Copper-doped TiO2 Thin Films by RF Magnetron Co-sputtering  

Heo, Min-Chan (Department of Physics, University of Ulsan)
Hong, Hyun-Joo (Department of Physics, University of Ulsan)
Hahn, Sung-Hong (Department of Physics, University of Ulsan)
Kim, Eui-Jung (Department of Chemical Engineering, University)
Lee, Chung-Woo (IHL)
Joo, Jong-Hyun (IHL)
Publication Information
Korean Journal of Optics and Photonics / v.17, no.1, 2006 , pp. 104-109 More about this Journal
Abstract
Cu-doped $TiO_2$ thin films were prepared by RF magnetron co-sputtering, and their structural, optical and photodegradation. properties were examined as a function of calcination temperature. XRD results showed that the crystallite size of Cu/$TiO_2$ thin films was bigger than that of the pure $TiO_2$ thin films. SEM results revealed that the agglomerated particle size of the Cu/$TiO_2$ films was more uniform and smaller than that of pure $TiO_2$ films. The absorption edge of thin films calcined at $900^{\circ}C$ was red shifted, resulting from the phase transformation from anatase to rutile phase, and the transmittance of the thin film rapidly decreased due to an increase in particle size. The photodegradation properties of the Cu/$TiO_2$ thin films were superior to those of the pure $TiO_2$ thin films.
Keywords
Thin film; Copper doping; Photodegradation;
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