대한전기학회논문지:전기물성ㆍ응용부문C (The Transactions of the Korean Institute of Electrical Engineers C)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

3차원 마이크로 디바이스 개발을 위한 나노 스테레오리소그래피 공정 개발에 관한 연구

Development of Nano-Stereolithography Process for Precise Fabrication of Three-Dimensional Micro-Devices

  • 박상후 (한국과학기술원 기계공학과) ;
  • 임태우 (한국과학기술원 기계공학과) ;
  • 양동열 (한국과학기술원 기계공학과) ;
  • 이신욱 (한국과학기술원 물리학과) ;
  • 공홍진 (한국과학기술원 물리학과) ;
  • 이광섭 (한남대학교 공과대학 생명정보신소재공학과)
  • 발행 : 2006.01.01
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⟨ 이전 논문 다음 논문 ⟩

초록

A nano-stereolithography (NSL) process has been developed for the fabrication of three-dimensional (3D) micro-devices with high spatital resolution of approximately 100 nm. In the NSL process, a complicated 3D structure can be created by stacking layer-by-layer, so it does not require any sacrificial layer or any supporting structure. A laminated layer was fabricated by means of solidifying liquid-state monomers using two-photon absorption (TPA) which was induced by a femtosecond laser. When the fabrication of a 3D stacked structure was finished, unsolidified liquid resins were rinsed by ethanol to develop the fabricated structures; then, the polymerized structure was only left on the glass substrate. Through this work, several 3D microstructures such as a micro-channel, shell structures, and photonic crystals were fabricated to evaluate the possibility of the developed system.

키워드

참고문헌

  1. S.Y. Chou, C. Keirnel, J. Gu, Ultrafast and direct imprint of nanstructures in silicon, Nature, vol. 417, no. 20, pp. 835-837, 2002 https://doi.org/10.1038/nature00792
  2. X.-M. Zhao, Y. Xia, G.M. Whitesides, Fabrication of three-dimensional micro-structures: Microtransfer molding,Adv. Mater., vol. 8, pp. 837-840, 1996 https://doi.org/10.1002/adma.19960081016
  3. E. Kim, Y. Xia, G.M. Whitesides, Polymer microstructures formed by moulding in capillaries, Nature, vol. 376, pp. 581-584, 1995 https://doi.org/10.1038/376581a0
  4. S.Y. Chou, P.R. Krauss, P.J. Renstrom, Nanoimprint lithography, J. Vac. Sci. Techn. B, vol. 14, no. 6, pp. 4129-4133, 1996 https://doi.org/10.1116/1.588605
  5. M.D. Austin, H. Ge, W. Wu, M. Li, Z. Yu, D. Wasserman, S.A. Lyon, S.Y. Chou, Fabrication of 5 nm linewidth and 14 nm pitch feature by nanoimprint lithography, Appl, Phys, Lett., vol. 84, no. 26, pp. 5299-5301, 2004 https://doi.org/10.1063/1.1766071
  6. H.B. Sun, M. Maeda, K. Takada, J.W.M. Chon, M. Gu, S. Kawata, Experimental investigation of single voxels for laser nanofabrication via two-photon photopolymerization, Appl. Phys. Lett., vol.83, no.5, pp.819-821, 2003 https://doi.org/10.1063/1.1598293
  7. S. Kawata, H.B. Sun, T. Tanaka, K Takada, Finer features for functional microdevices, Nature, vo1.412, no.16, pp.697-698, 2001 https://doi.org/10.1038/35089130
  8. J. Serbin, A. Egbert, A. Ostendorf, B.N. Chichkov, Femtosecond laser-induced two-photon polymerization of inorganic-organic hybrid materials for applications in photonics, Optics Lett., vol.28, no.5, pp.301-303, 2003 https://doi.org/10.1364/OL.28.000301
  9. S. Maruo, S. Kawata, Two-photon-absorbed near-infrared photopolyrnerization for three-dimensional microfabrication, J. of MEMS, vol.7, no.4, pp.411-415, 1998 https://doi.org/10.1109/84.735349
  10. H.B. Sun, T. Tanaka, S.Kawata, Three-dimensional focal spots related to two-photon excitation, Appl, Phys, Lett., vol.80, no.20, pp.3673-3675, 2002 https://doi.org/10.1063/1.1478128
  11. S.H. Park, S.H. Lee, D.Y. Yang, H.J. Kong, K.S. Lee, Subregional slicing method to increase 3D nanofabrication efficiency in two-photon polymerization, Appl. Phys. Lett, vol 87, pp. 154108, 2005 https://doi.org/10.1063/1.2103393
  12. S.H. Park, T.W. Lim, D.Y. Yang, H.J. Kong, K.S. Kim, K.S. Lee, Fabrication of Nano-precision PDMS Replica using Two-photon Photopolymerization and Vacuum Pressure Difference Technique, Bulle. Korean Chem. Soc. (communication), vol.25 no.8, pp.1119-1120, 2004 https://doi.org/10.5012/bkcs.2004.25.8.1119
  13. S.H. Park, T.W. Lim, D.Y. Yang, H.J. Kong, K.S. Lee, Fabrication Process of Nano-precision PDMS Replica using Vacuum Pressure-Difference Technique, Polymer (Korea), vol.28, no.4, pp.305-313, 2004
  14. S.H. Park, T.W. Lim, D.Y. Yang, H.J. Kong, Fabrication of a PDMS (poly-dimethylsiloxane) Stamp using Nano-Replication Printing Process, J. KSME, vol.28, no.7, pp.999-1005, 2004 https://doi.org/10.3795/KSME-A.2004.28.7.999
  15. A. Abe et al., Advance in Polymer Science 170NMR, 3D Analysis, Photopolymerization, Springer, New York, 2004
  16. T.A. Pham, T.W. Lim, S.H. Park, D.Y. Yang, D.P. Kim, Synthesis of inorganic polymeric photoresistor and its application using lithography techniques, 11th Asian Chemistry Congress (ACC), 24-26 Aug., Seoul Korea, 2005
  17. J.P. Fouassier, Photoinitiation, Photopolymerization, and Photocuring-Fundamentals and Applications, New York, 1995
  18. S.H. Park, T.W. Lim, D.Y. Yang, H.J. Kong, K.S. Lee, A Scheme to Control Laser Power and Exposure Time for Fabricating Precise 3-Dimensional Micro-structures using Two-photonPolymerization J. Korean Chemical Society, vol. 49, no. 3, pp, 292-299, 2005 https://doi.org/10.5012/jkcs.2005.49.3.292