대한전기학회논문지:전기물성ㆍ응용부문C (The Transactions of the Korean Institute of Electrical Engineers C)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

단일탐침법을 사용한 평판형 광원의 제논 (Xe) 플라즈마 특성 연구

Xe Plasma Property with Flat Lamp by Langmuir Probe

  • 백광현 (원광대 전자재료공학과) ;
  • 이종찬 (금호전기㈜ 부설연구소) ;
  • 황명근 (한국조명기술연구소) ;
  • 최용성 (원광대 전기전자및정보공학부) ;
  • 박대희 (원광대 전기전자및정보공학부)
  • 발행 : 2006.01.01
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초록

The study on discharge of the flat lamp lighting source has been requested increasingly. To improve the brightness, life time and efficiency of flat lamp, the plasma diagnosis of flat lamp lighting source is very important. When a distance of discharge electrode is 5.5mm and width is 16.5mm, we measured electron temperature and electron density with single Langmuir probe in flat lamp. Pressure conditions to test the plasma discharge from 100 Torr to 300 Torr. The power supply was PDS-4000 with frequency 20kHz and duty ratio $20\%.$ Form these experimental results, electron temperature was decreased according to increase the gas pressure and the voltage while electron density was increased.

키워드

참고문헌

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