Journal of Institute of Control, Robotics and Systems (제어로봇시스템학회논문지)

Institute of Control, Robotics and Systems (제어로봇시스템학회)
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A Micro-Flow Sensor With Multiple Temperature Sensing Elements for Wide Range Flow Velocity Measurement

다단계 온도 감지막을 가진 고영역 흐름측정용 마이크로 흐름센서

  • 정완영 (동서대학교 인터넷공학부) ;
  • 김태용 (동서대학교 인터넷공학부) ;
  • 서용수 (동서대학교 전자공학과)
  • Published : 2006.01.01
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Abstract

A new silicon micro flow sensor with multiple temperature sensing elements was proposed and fabricated in considering wide range flow velocity measuring device. Thermal mass flow sensor measures the asymmetry of temperature profile around the heater which is modulated by the fluid flow. A micro mass flow sensor was normally composed of a central heater and a pair of temperature sensing elements around it. A new 2-D wide range micro flow sensor structure with three pairs of temperature sensing elements and a central heater was proposed and numerically simulated by Finite Difference Formulation to confirm the feasibility of the wide flow range sensor structure. To confirm the simulation result, the new flow sensor was fabricated on silicon substrate and the basic flow sensing properties of the sensor were measured.

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References

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