루틸단결정 성장을 위한 스컬용융시스템의 조건

Conditions of Skull melting system for rutile single crystals growth

  • 발행 : 2006.08.31

초록

스컬용융법은 생산원가가 낮고 crust의 재사용으로 수율이 좋아 양질의 산화물단결정성장 및 대량생산에 좋은 방법이다. 본 연구에서는 루틸단결정을 스컬용융법에 의해 성장시켰으며, 서로 다른 성장조건에서의 ingot특성을 비교하였다. 좋은 품질의 루틸 ingot 성장을 위한 조건은 직경 12, 높이 14cm 도가니 사용, 3000pF의 tank condenser 용량, 2.84 MHz의 주파수, 9시간의 용액유지시간, 2mm/h의 성장속도였다.

Skull melting method can be a good candidate for growing oxide single crystals with high quality and for mass production because of its low production costs and high yield through recycling of crust. In this study, rutile single crystals were frown by the skull melting method and ingot characteristics with the variation of different growth conditions has been investigated. Conditions for high quality rutile ingot growth were used for producing cold-crucible size of ${\Phi}12cm{\times}H14cm$, capacity of 3000 pF tank condenser, work frequency of 2.84 MHz, melt-dwelling time of 9hrs and growing speed of 2 mm/h.

키워드

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