Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Gas sensing characteristics of carbon nanotube gas sensor using a diaphragm structure

다이아프램 구조를 이용한 탄소나노튜브 가스 센서의 가스 감응 특성

  • Cho, Woo-Sung (Department of Electronic Engineering, Korea University) ;
  • Moon, Seung-Il (Department of Electronic Engineering, Korea University) ;
  • Kim, Young-Cho (Department of Electronic Engineering, Chungwoon University) ;
  • Park, Jung-Ho (Department of Electronic Engineering, Korea University) ;
  • Ju, Byeong-Kwon (Department of Electrical Engineering, Korea University)
  • Published : 2006.01.31
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Abstract

The micro-gas sensor based on carbon nanotubes (CNTs) was fabricated and its gas sensing characteristics on nitrogen dioxide ($NO_{2}$) have been investigated. The sensor consists of a heater, an insulating layer, a pair of contact electrodes, and CNT-sensing film on a micromachined diaphragm. The heater plays a role in the temperature change to modify sensor operation. Gas sensor responses of CNT-film to $NO_{2}$ at room temperature are reported. The sensor exhibits a reversible response with a time constant of a few minutes at thermal treatment temperature of $130^{\circ}C$.

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References

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