Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Room-temperature and low-pressure nanoimprint lithography technology

상온저압 나노임프린트 리소그래피 기술

  • 정준호 (한국기계연구원 지능형정밀기계연구부) ;
  • 이응숙 (한국기계연구원 지능형정밀기계연구부)
  • Published : 2005.02.01
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Abstract

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References

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