Applied Chemistry for Engineering (공업화학)

The Korean Society of Industrial and Engineering Chemistry (한국공업화학회)
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Formation of Si Nanodot by Using SiNx Thin Films

SiNx 박막을 이용한 Si Nanodot의 형성

  • Lee, Jang Woo (Department of Chemical Engineering, Inha University) ;
  • Park, Ik Hyun (Department of Chemical Engineering, Inha University) ;
  • Shin, Byul (Department of Chemical Engineering, Inha University) ;
  • Chung, Chee Won (Department of Chemical Engineering, Inha University)
  • 이장우 (인하대학교 화학공학과) ;
  • 박익현 (인하대학교 화학공학과) ;
  • 신별 (인하대학교 화학공학과) ;
  • 정지원 (인하대학교 화학공학과)
  • Received : 2005.03.28
  • Accepted : 2005.09.23
  • Published : 2005.12.10
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Abstract

The deposition of silicon nitride ($SiN_x$) thin films was carried out on $SiO_2/Si$ substrate at room temperature by reactive dc magnetron sputtering. The analysis of deposited $SiN_x$ films using x-ray photoelectron spectroscopy indicated that the composition of $SiN_x$ films was Si-rich. The deposited $SiN_x$ thin films were annealed by varying annealing temperature and time. X-ray diffraction (XRD) analysis was performed in order to examine the crystallization of Si in $SiN_x$ thin films. The optical and electrical properties of $SiN_x$ thin films were measured for the observation of Si nanodot. As a result, we observed the XRD peaks that might be the Si crystals. As the annealing time and annealing temperature increased, the photoluminescence intensity of $SiN_x$ films gradually increased. The capacitance-voltage characteristics of $SiN_x$ film measured before and after annealing indicated that the trap effect of electrons or holes occurred due to the existence Si nanodots in the $SiN_x$ thin films.

Silicon nitride ($SiN_x$) 박막이 상온에서 $SiO_2/Si$ 기판 위에 반응성 직류 마그네트론 스퍼터링 방법에 의하여 증착되었다. 증착된 $SiN_x$ 박막의 조성은 x-ray photoelectron spectroscopy를 이용하여 분석되었으며 Si가 풍부한 $SiN_x$ 박막이 증착되었음을 확인할 수 있었다. 증착된 $SiN_x$ 박막은 annealing 온도와 시간을 변화하여 annealing 되었다. X-ray diffraction (XRD) 분석이 $SiN_x$ 박막 내에 Si의 결정화를 조사하기 위해서 수행되었고, 박막의 광학적 특성과 전기적 특성들이 Si nanodot의 형성을 확인하기 위하여 측정되었다. 그 결과로써, XRD 분석에서 Si으로 예상되어지는 peak을 관찰할 수 있었으며 annealing 시간과 온도가 증가함에 따라서 $SiN_x$ 박막의 photoluminescence intensity는 점진적으로 증가하는 것이 관찰되었다. Annealing 전과 후에 측정된 $SiN_x$ 박막의 capacitance-voltage 특성으로부터 $SiN_x$ 박막 내에 존재하는 Si nanodot에 의하여 electron이나 hole의 trap 효과가 나타남을 예상할 수 있었다.

Keywords

Acknowledgement

Supported by : 인하대학교

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