MCS-BEq에 의한 $SF_6-Ar$혼합기체(混合氣體)의 전자(電子) 이동속도(移動速度)

Drift Velocities for Electrons in $SF_6$-Ar Mixtures Gas by MCS-Beq Algorithm

  • 발행 : 2005.03.31

초록

Energy distribution function for electrons in $SF_6$-Ar mixtures gas by MCS-BEq algorithm has been analysed over the E/N range $30{\sim}300$[Td] by a two term Boltana equation and by a Monte Carlo Simulation using a set of electron cross sections determined by other, authors, experimentally the electron swarm parameters for 0.2[%} and 0.5[%] $SF_6$-Ar mixtures were measured by time-of-flight(TOF) method. The result show that the deduced electron drift velocities, the electron ionization or attachment coefficients, longitudinal and transverse diffusion coefficients and mean energy agree reasonably well with theoretical for a rang of E/N values. The results obtained from Booltemann equation method and Monte Carlo simulation have been compared with present and previously obtained data and respective set of electron collision cross sections of the molecules.

키워드

참고문헌

  1. H. Itoh, Y. Miura, N. Ikuba, Y. Nakao and H. Tagashira, 'Electronswarm development in $SF_6$ : 1. Boltamann equation analysis' Phys. D: Appl. Phys. 21, pp.922-930, 1988 https://doi.org/10.1088/0022-3727/21/6/010
  2. 電氣學會技術報告,氣體放電シミユレ-シヨン技法' 弟140號, 1974
  3. 谷口擊辛 et al., 'ボルツマン方程式による彊駒量體變換 斷面慣の推定に關して'. 放電硏究會資料, ED-B6-116, pp.39-49, 1986
  4. S. Trajmar, A. 'Chutijian, electron impect excitation of $SF_6$' J. Phys. B, Vol. 10, pp. 2943-2949, 1977 https://doi.org/10.1088/0022-3700/10/14/026
  5. 大森義行, 下雲光夫, 田頭博昭, 'SiH_4 ガスの電子衝突斷面揖およびスウオ-ムペラメ-タ' 電氣學會硏究會資料, ED-B6-114, HV-B6-34, 1988
  6. 菅野卓雄 親著, '半導體プラズマプロセス技術', 産業圖書, pp. 38-50, 1993
  7. 小沼光晴著 'アラズヌと成分の甚礎',日刊工業新聞社, pp.13-20, 1993
  8. C. Jacoboni and P. Lugli, 'The Monge Carlo Method for Semiconductor Device Simulation', Springer-Verlag Wien, pp. 1-4, 1989
  9. Philip, E. Luft, 'Description of a Backward prolongation program for computing transport coefficients', JILA, information center report, No, 19, 1975
  10. Pollock W. J. 'Momentum Transfer and Vibrational Crosssections in Non-polar Gases' Trans. Fareday. Soc. , 64, 2919-2926, 1988
  11. A. V. Phelps and R. J. Van Brunt 'Electron-transport ionization attachment and dissociation coefficients in $SF_6$ and its mixture', J. Appl. Phys. 64, pp. 4269-4277, 1988 https://doi.org/10.1063/1.341300
  12. M. Hayashi and S. Hara, Joint Symposium on Electron and Ion Swarm and Low Energy Electron Scattering, (A Satellite of ICPEAC XVII) , Proc, pp. 109-111, 1991
  13. 金相南 '$SF_6$-Ar 混合氣體에서의 電離 및 附養係數' 工學博士 學位論文, 東國大學校, 2000
  14. Y, Nakamara, 'Transport Coefficients of Electrons and Negative Ions $SF_6$' J. Phys. D, Vol. pp. 1-36, 1981
  15. Y. Nakernura and M. Kurachi , 'Electron Transport Parameters in Argon and its momentum transfer cross section' J, Phys, 21, pp. 718-723, 1988
  16. K L, Bell, N, S, Scott and M A, Lennon, 'The Scattering of low energy electrons by A rgon atoms' J, Phys, B: Mol. Phys. 17, pp.,4757 -4765, 1984 https://doi.org/10.1088/0022-3700/17/23/016
  17. W. C. Fon, K. A. Berrington, P. G. Burke, 'The elastic Scatterling of electrons from Argon atoms' J. Phvs, B : At. Mol. Phys, 16, pp,307-321, 1983 https://doi.org/10.1088/0022-3700/16/2/018
  18. Aratl Dasqutxa and A. K. Bhatia,' Scattering of electrons from Argon atoms' Phys. Rev. A, Vol. 32., No, 6, pp.3335-3341, 1985 https://doi.org/10.1103/PhysRevA.32.3335
  19. 下妻, 金子, 程里, 'C-$C_4F_3$$SiH_4$ ガスの 電離係數測定定', 電氣學會放電硏究會, ED-B3-B6, 1983
  20. 金相南, '시뮬레이션에 의한 $CF_4$, $CH_4$ Ar混合氣體에서 電子에너지분포함수' 대한전기학회논문집, 52P-1-2 pp. 9-13, 2003
  21. M S. Dincer and T. Aydin, 'Simulation cf limiting field behavior in electrons swarms in field behavior in electrons swarms in $SF_6$, $N_2$ gas mixtures' IEEE, transaction on dielectrics and electrical insulation, Vol. 1, No, 1, pp. 139-145, February, 1994 https://doi.org/10.1109/94.300241
  22. A. Gilardini, 'Low Energy Electron Collisions in Gases' in John Willey and Sons, Inc, pp. 127-162 1972