1 |
H. Itoh, Y. Miura, N. Ikuba, Y. Nakao and H. Tagashira, 'Electronswarm development in : 1. Boltamann equation analysis' Phys. D: Appl. Phys. 21, pp.922-930, 1988
DOI
ScienceOn
|
2 |
電氣學會技術報告,氣體放電シミユレ-シヨン技法' 弟140號, 1974
|
3 |
小沼光晴著 'アラズヌと成分の甚礎',日刊工業新聞社, pp.13-20, 1993
|
4 |
Pollock W. J. 'Momentum Transfer and Vibrational Crosssections in Non-polar Gases' Trans. Fareday. Soc. , 64, 2919-2926, 1988
|
5 |
Y, Nakamara, 'Transport Coefficients of Electrons and Negative Ions ' J. Phys. D, Vol. pp. 1-36, 1981
|
6 |
Y. Nakernura and M. Kurachi , 'Electron Transport Parameters in Argon and its momentum transfer cross section' J, Phys, 21, pp. 718-723, 1988
|
7 |
Aratl Dasqutxa and A. K. Bhatia,' Scattering of electrons from Argon atoms' Phys. Rev. A, Vol. 32., No, 6, pp.3335-3341, 1985
DOI
PUBMED
|
8 |
M S. Dincer and T. Aydin, 'Simulation cf limiting field behavior in electrons swarms in field behavior in electrons swarms in , gas mixtures' IEEE, transaction on dielectrics and electrical insulation, Vol. 1, No, 1, pp. 139-145, February, 1994
DOI
ScienceOn
|
9 |
A. Gilardini, 'Low Energy Electron Collisions in Gases' in John Willey and Sons, Inc, pp. 127-162 1972
|
10 |
K L, Bell, N, S, Scott and M A, Lennon, 'The Scattering of low energy electrons by A rgon atoms' J, Phys, B: Mol. Phys. 17, pp.,4757 -4765, 1984
DOI
ScienceOn
|
11 |
W. C. Fon, K. A. Berrington, P. G. Burke, 'The elastic Scatterling of electrons from Argon atoms' J. Phvs, B : At. Mol. Phys, 16, pp,307-321, 1983
DOI
ScienceOn
|
12 |
C. Jacoboni and P. Lugli, 'The Monge Carlo Method for Semiconductor Device Simulation', Springer-Verlag Wien, pp. 1-4, 1989
|
13 |
大森義行, 下雲光夫, 田頭博昭, 'SiH_4 ガスの電子衝突斷面揖およびスウオ-ムペラメ-タ' 電氣學會硏究會資料, ED-B6-114, HV-B6-34, 1988
|
14 |
A. V. Phelps and R. J. Van Brunt 'Electron-transport ionization attachment and dissociation coefficients in and its mixture', J. Appl. Phys. 64, pp. 4269-4277, 1988
DOI
|
15 |
金相南 '-Ar 混合氣體에서의 電離 및 附養係數' 工學博士 學位論文, 東國大學校, 2000
|
16 |
Philip, E. Luft, 'Description of a Backward prolongation program for computing transport coefficients', JILA, information center report, No, 19, 1975
|
17 |
M. Hayashi and S. Hara, Joint Symposium on Electron and Ion Swarm and Low Energy Electron Scattering, (A Satellite of ICPEAC XVII) , Proc, pp. 109-111, 1991
|
18 |
谷口擊辛 et al., 'ボルツマン方程式による彊駒量體變換 斷面慣の推定に關して'. 放電硏究會資料, ED-B6-116, pp.39-49, 1986
|
19 |
金相南, '시뮬레이션에 의한 , Ar混合氣體에서 電子에너지분포함수' 대한전기학회논문집, 52P-1-2 pp. 9-13, 2003
|
20 |
下妻, 金子, 程里, 'C- 과 ガスの 電離係數測定定', 電氣學會放電硏究會, ED-B3-B6, 1983
|
21 |
菅野卓雄 親著, '半導體プラズマプロセス技術', 産業圖書, pp. 38-50, 1993
|
22 |
S. Trajmar, A. 'Chutijian, electron impect excitation of ' J. Phys. B, Vol. 10, pp. 2943-2949, 1977
DOI
ScienceOn
|