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Drift Velocities for Electrons in $SF_6$-Ar Mixtures Gas by MCS-Beq Algorithm  

Kim, Sang-Nam (인천전문대학 전기과)
Publication Information
The Transactions of the Korean Institute of Electrical Engineers P / v.54, no.1, 2005 , pp. 29-33 More about this Journal
Abstract
Energy distribution function for electrons in $SF_6$-Ar mixtures gas by MCS-BEq algorithm has been analysed over the E/N range $30{\sim}300$[Td] by a two term Boltana equation and by a Monte Carlo Simulation using a set of electron cross sections determined by other, authors, experimentally the electron swarm parameters for 0.2[%} and 0.5[%] $SF_6$-Ar mixtures were measured by time-of-flight(TOF) method. The result show that the deduced electron drift velocities, the electron ionization or attachment coefficients, longitudinal and transverse diffusion coefficients and mean energy agree reasonably well with theoretical for a rang of E/N values. The results obtained from Booltemann equation method and Monte Carlo simulation have been compared with present and previously obtained data and respective set of electron collision cross sections of the molecules.
Keywords
MCS(Monte Carlo Simulation); BEq(Bolternann equationi); TOF(Time Of Flight Method);
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1 H. Itoh, Y. Miura, N. Ikuba, Y. Nakao and H. Tagashira, 'Electronswarm development in $SF_6$ : 1. Boltamann equation analysis' Phys. D: Appl. Phys. 21, pp.922-930, 1988   DOI   ScienceOn
2 電氣學會技術報告,氣體放電シミユレ-シヨン技法' 弟140號, 1974
3 小沼光晴著 'アラズヌと成分の甚礎',日刊工業新聞社, pp.13-20, 1993
4 Pollock W. J. 'Momentum Transfer and Vibrational Crosssections in Non-polar Gases' Trans. Fareday. Soc. , 64, 2919-2926, 1988
5 Y, Nakamara, 'Transport Coefficients of Electrons and Negative Ions $SF_6$' J. Phys. D, Vol. pp. 1-36, 1981
6 Y. Nakernura and M. Kurachi , 'Electron Transport Parameters in Argon and its momentum transfer cross section' J, Phys, 21, pp. 718-723, 1988
7 Aratl Dasqutxa and A. K. Bhatia,' Scattering of electrons from Argon atoms' Phys. Rev. A, Vol. 32., No, 6, pp.3335-3341, 1985   DOI   PUBMED
8 M S. Dincer and T. Aydin, 'Simulation cf limiting field behavior in electrons swarms in field behavior in electrons swarms in $SF_6$, $N_2$ gas mixtures' IEEE, transaction on dielectrics and electrical insulation, Vol. 1, No, 1, pp. 139-145, February, 1994   DOI   ScienceOn
9 A. Gilardini, 'Low Energy Electron Collisions in Gases' in John Willey and Sons, Inc, pp. 127-162 1972
10 K L, Bell, N, S, Scott and M A, Lennon, 'The Scattering of low energy electrons by A rgon atoms' J, Phys, B: Mol. Phys. 17, pp.,4757 -4765, 1984   DOI   ScienceOn
11 W. C. Fon, K. A. Berrington, P. G. Burke, 'The elastic Scatterling of electrons from Argon atoms' J. Phvs, B : At. Mol. Phys, 16, pp,307-321, 1983   DOI   ScienceOn
12 C. Jacoboni and P. Lugli, 'The Monge Carlo Method for Semiconductor Device Simulation', Springer-Verlag Wien, pp. 1-4, 1989
13 大森義行, 下雲光夫, 田頭博昭, 'SiH_4 ガスの電子衝突斷面揖およびスウオ-ムペラメ-タ' 電氣學會硏究會資料, ED-B6-114, HV-B6-34, 1988
14 A. V. Phelps and R. J. Van Brunt 'Electron-transport ionization attachment and dissociation coefficients in $SF_6$ and its mixture', J. Appl. Phys. 64, pp. 4269-4277, 1988   DOI
15 金相南 '$SF_6$-Ar 混合氣體에서의 電離 및 附養係數' 工學博士 學位論文, 東國大學校, 2000
16 Philip, E. Luft, 'Description of a Backward prolongation program for computing transport coefficients', JILA, information center report, No, 19, 1975
17 M. Hayashi and S. Hara, Joint Symposium on Electron and Ion Swarm and Low Energy Electron Scattering, (A Satellite of ICPEAC XVII) , Proc, pp. 109-111, 1991
18 谷口擊辛 et al., 'ボルツマン方程式による彊駒量體變換 斷面慣の推定に關して'. 放電硏究會資料, ED-B6-116, pp.39-49, 1986
19 金相南, '시뮬레이션에 의한 $CF_4$, $CH_4$ Ar混合氣體에서 電子에너지분포함수' 대한전기학회논문집, 52P-1-2 pp. 9-13, 2003
20 下妻, 金子, 程里, 'C-$C_4F_3$$SiH_4$ ガスの 電離係數測定定', 電氣學會放電硏究會, ED-B3-B6, 1983
21 菅野卓雄 親著, '半導體プラズマプロセス技術', 産業圖書, pp. 38-50, 1993
22 S. Trajmar, A. 'Chutijian, electron impect excitation of $SF_6$' J. Phys. B, Vol. 10, pp. 2943-2949, 1977   DOI   ScienceOn