Transactions of the Korean Society of Machine Tool Engineers (한국공작기계학회논문집)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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Frequency Characteristics of Micro-cantilever Sensor using Tuning Fork

튜닝포크형 미소 캔틸레버 센서의 주파수 특성

  • 김충현 (한국과학기술연구원 트라이볼로지연구센터) ;
  • 안효석 (한국과학기술연구원 트라이볼로지연구센터)
  • Published : 2005.10.01
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Abstract

An experimental Investigation of the basic characteristics of a micro-cantilever sensor was performed by inspecting the amplitude and frequency characteristics of a commercial tuning fork (TF). Application of acetone and ethanol with a volume of $1{\mu}l$ on the tine of a vibrating tuning fork causes immediate response in its amplitude and frequency characteristics. It has been shown that the tuning fork has ability to recognize a chemical agent with high sensitivity. The theoretical sensitivity of mass loading is in the range of $\~0.1Hz/ng$. Quartz tuning forks are routinely made using standard microfabrication process, thus suggesting the possibility of microfabrication of micro quart sensors.

Keywords

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