References
- Soloman, S., 1998, Viscous Fluid Flow Sensors Handbook, McGraw-Hill, New York, pp. 51.1-51.10
- Benes, E., Groschl, M., Burger,W., and Schmid, M., 1995, 'Sensors based on piezoelectric resonators,' Sensors and Actuator A, Vol. 48, pp. 1-21 https://doi.org/10.1016/0924-4247(95)00846-2
- Lee, J.-H., Yoo, J.-H., Yim, S.-Y., and Park, S.-H., 2004, 'Symmetric and Asymmetric Resonance Characteristics of a Tuning Fork for Shear-Force Detection,' J. of the Korean Physical Society, Vol. 45, No. 2, pp. 455-459
- Zeisel, D., Menzi, H., and Ullrich, L., 2000, 'A precise and robust quartz sensor based on tuning fork technolgy for (SF6)-gas density control,' Sensors and Actuator A, Vol. 80, pp. 233-236 https://doi.org/10.1016/S0924-4247(99)00345-3
- Dring, A. L., and Jones, B. E., 2000, 'Integrated on-line multisensing of fluid flow using a mechanical resonator,' Sensors and Actuator A, Vol. 85, pp. 275-279 https://doi.org/10.1016/S0924-4247(00)00429-5
- Beeby, S. P., Ensell, G., and White, M., Dec. 2000, 'Microengineered silicon double-ended tuning-fork resonators,' Microengineering and Education Journal, pp. 265-271
- Nakata, S., Akakabe, S., Nakasuji, M., and Yoshikawa, K., 1996, 'Gas sensing based on a nonlinear response: Discrimination between hydocarbons and quantification of individual components in a gas mixture,' Anal. Chem., Vol. 68, pp. 2067-2072 https://doi.org/10.1021/ac9510954
- Kee, J. Y., 2005, 'A study on curvature radius measurement using laser interferometer,' Trans. KSMTE., Vol. 13, No. 6, pp. 34-40
- ea, S. J., and Welland, M .E., 1998, 'Atomic force microscopy at solid-liquid interface,' Langmuir, Vol. 14, pp. 4186-4197 https://doi.org/10.1021/la9801864
- Karrai, K., and Grober, R. D., 1995, 'Piezoelectric tip-sample distance control for near-field optical microscope,' Appl. Phys. Lett. Vol. 66, pp. 1842-1844 https://doi.org/10.1063/1.113340
- Buchaillot, L., Farnault, E., Hoummady, M., and Fujita, H., 1997, 'Silicon nitride thin film Young's modulus determination by an optical non destructive method,' Japan J. Appl. Phys. Part 2, 36(6B), L794-L797 https://doi.org/10.1143/JJAP.36.L794
- Greenspon, J. E., 'Vibrations of cross-stiffened and sandwich plates with application to underwater sound radiators,' J. Acoust. Soc. Am., Vol. 33, pp. 1485-1491 https://doi.org/10.1121/1.1908480