References
- N. Savage, 'Linking with Light,' IEEE Spectrum, 39 [8] 32-6 (2002)
- W. S. Kim, J. H. Lee, S. Y. Shin, B. S. Bae, and Y. C. Kim, 'Fabrication of Ridge Waveguides by UV Embossing and Stamping of Sol-Gel Hybrid Materials,' IEEE Photonics Technol. Lett., 16 [8] 1888-90 (2004) https://doi.org/10.1109/LPT.2004.831053
- M. Hikita, S. Tomaru, K. Enbutsu, N. Ooba, R. Yoshimura, M. Usui, T. Yoshida, and S. Imamura, 'Polymeric Optical Waveguide Films for Short-Distance Optical Interconnects,' IEEE J., 5 [5] 1237-42 (1999)
- M. T. Gale, C. Gimkiewicz, S. Obi, M. Schnieper, J. Sochitg, H. Thiele, and S. Westenhofer, 'Replication Technology for Optical Microsystems,' Optics and Lasers in Eng., 43 [3-5] 373-86 (2005) https://doi.org/10.1016/j.optlaseng.2004.02.007
- S. Y. Chou, P. R. Krauss, and P. J. Rennstrom, 'Nanoim¬print Lithography,' J. Vac. Sci. Tech. B, 14 [6] 4129-33 (1996) https://doi.org/10.1116/1.588605
- S. Y. Chou, P. R. Krauss, W. Zhang, L. Guo, and L. Zhang, 'Sub-10 nm Imprint Lithography and Applications,' J. Vac. Sci. Tech. B, 15 [6] 2897-904 (1997) https://doi.org/10.1116/1.589752
- T. Bailey, B. J. Choi, M. Colburn, M. Meissl, S. Shaya, J. G. Ekerdt, S. V. Sreenivasan, and C. G. Willson, 'Step and Flash Imprint Lithography: Template Surface Treatment and Defect Analysis,' J. Vac. Sci. Tech. B, 18 [6] 3572-77 (2000) https://doi.org/10.1116/1.1324618
- C. Park, J. Yoon, and E. L. Thomas, 'Enabling Nanotechnology with Self Assembled Block Copolymer Patterns,' Polymer, 44 [22] 6725-60 (2003) https://doi.org/10.1016/j.polymer.2003.08.011
- Y. Xia and G. M. Whitesides, 'Soft Lithography,' Angew. Chem., Int. Ed., 37 [5] 550-75 (1998) https://doi.org/10.1002/(SICI)1521-3773(19980316)37:5<550::AID-ANIE550>3.0.CO;2-G
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