참고문헌
- Adams, D. P., Vasile, M. J., Benavides, G., Campbell, A. N., 'Micromilling of metal alloys with focused ion beam-fabricated tools,' Precision Engineering, Vol. 25, pp. 107-113, 2001 https://doi.org/10.1016/S0141-6359(00)00064-7
- Okazaki, Y., Kitahara, T., 'NC micro-lathe to machine micro-parts,' American Society for Precision Engineering, Vol. 22, pp. 575-578, 2000
- Kussul, E., Gaidyk, T., Ruiz-Huerta, L., Caballero-Ruiz, A., Velasco, G., Kasatkina, L., 'Development of micromachine tool prototypes for micro factories,' J. Micromech. Microeng., Vol. 12, pp. 795-812, 2002 https://doi.org/10.1088/0960-1317/12/6/311
- Okazaki, Y., Mishima, N., Ashida, K., 'Microfactory and micro machine tools,' The 1st Korea-Japan Conference on Positioning Technology, Daejeon, Korea, pp. 1-6, 2002
- Lu, Z., Yoneyama, T., 'Micro cutting in the micro lathe turning system,' Int. J. of Mach. Tools & Manuf., Vol. 39, pp. 1171-1183, 1999 https://doi.org/10.1016/S0890-6955(98)00092-3
- Wang, W., Kweon, S. H., Yang, S. H., 'A study on roughness of the micro-end-milled surface produced by a miniatured machine tool,' J. of Materials Processing Technology, to be appeared, 2005 https://doi.org/10.1016/j.jmatprotec.2005.02.141
- Li, J., Sedaghati, R., Dargahi, J., Waechter, D., 'Design and development of a new piezoelectric linear inchworm actuator,' Mechatronics, Vol. 15, Issue 6, pp. 651-681, 2005 https://doi.org/10.1016/j.mechatronics.2005.02.002
- Tenzer, P. E., Mrad, R. B., 'On amplification in inchworm precision positioners,' Mechatronics, Vol. 14, Issue 5, pp. 515-531, 2004 https://doi.org/10.1016/j.mechatronics.2003.10.004
- Burleigh Instruments Inc. Catalogue, The power of precision in nanopositioning, pp. 388-1295, 1995
- Paros, J. M., Weisbord, L., 'How to design flexure hinges,' Machine Design, Vol. 37, pp. 151-157, 1665
- Seong, C. H., Kim, H. C., Kim, K. S., 'Characteristics of surface roughness in the high speed micro turning of aluminum alloy,' Journal of the KSPE, Vol. 16. No. 7, pp. 94-100, July 1999