Journal of the Korean Electrochemical Society (전기화학회지)

The Korean Electrochemical Society (한국전기화학회)
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Electrode Properties of Thin Film Battery with LiCoO2 Cathode Deposited by R.F. Magnetron Sputtering at Various Ar Partial Pressures

R.F. 마그네트론 스퍼터링을 이용한 LiCoO2 양극활물질의 Ar 증착분압에 따른 박막전지 전극 특성

  • Park, H.Y. (Microcell Center, Nuricell Inc.,) ;
  • Lim, Y.C. (Microcell Center, Nuricell Inc.,) ;
  • Choi, K.G. (Microcell Center, Nuricell Inc.,) ;
  • Lee, K.C. (Microcell Center, Nuricell Inc.,) ;
  • Park, G.B. (Microcell Center, Nuricell Inc.,) ;
  • Kwon, M.Y. (Advanced Technology Research Center, Agency for Defense Development) ;
  • Cho, S.B. (Advanced Technology Research Center, Agency for Defense Development) ;
  • Nam, S.C. (Microcell Center, Nuricell Inc.,)
  • 박호영 (㈜누리셀 마이크로셀 센터) ;
  • 임영창 (㈜누리셀 마이크로셀 센터) ;
  • 최규길 (㈜누리셀 마이크로셀 센터) ;
  • 이기창 (㈜누리셀 마이크로셀 센터) ;
  • 박기백 (㈜누리셀 마이크로셀 센터) ;
  • 권미연 (국방과학연구소 기술연구본부) ;
  • 조성백 (국방과학연구소 기술연구본부) ;
  • 남상철 (㈜누리셀 마이크로셀 센터)
  • Published : 2005.02.01
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Abstract

We investigated the electrochemical properties and microstructure on the various argon deposition pressure $(P_{Ar})$ and the low annealing temperature $(400^{\circ}C)$ of $LiCoO_2$ cathodes, which deposited by R.F. magnetron sputtering. The microsuucture and composition of Lico02 thin film was changed as a function of $P_{Ar}$. The capacity and electrochemical properties were improved with Ph of $LiCoO_2$ thin films. The cycling reversibility and stability of thin film batteries were measured by cyclic voltammetry and the constant current charge-discharge. The physical properties of cathode films were analyzed by ICP-AES, XRD, SEM and AFM for composition, crystallization and surface morphology.

Ar공정 분압에 따라 스퍼터링된 $LiCoO_2$박막 양극의 $400^{\circ}C$저온 열처리를 통한 전기화학적 및 미세구조적 특성을 연구하였다. Ar분압이 변화함에 따라 양극 박막의 미세구조 및 조성이 변화하였으며, Ar분압이 증가할수록 $LiCoO_2$ 박막의 안정성 및 전기화학적 특성이 개선되었다. 순환전류전위법 및 정전류 충방전 시험에 의해 전극반응의 가역성 및 안정성 등을 고찰하였으며, 박막의 조성, 결정성, 표면 특성 등 물리적 특성은 ICP-AES, XRD, SEM 및 AFM을 통해 분석하였다.

Keywords

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