대한전기학회논문지:전기물성ㆍ응용부문C (The Transactions of the Korean Institute of Electrical Engineers C)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

MEMS 기반의 IR $CO_2$ 센서 제작 및 특성 평가

A Fabrication of IR $CO_2$ Sensor based on the MEMS and Characteristic Evaluation

  • 김신근 (연세대 보건과학대 의공학과) ;
  • 한용희 (고려대 공대 재료공학과) ;
  • 문성욱 (KIST 마이크로시스템 연구센터)
  • 발행 : 2005.05.01
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초록

In this paper, we fabricated $CO_2$ gas sensor based on the MEMS infrared sensor and characterized its electrical and $CO_2$-sensing properties. The fabricated $CO_2$ gas sensor by MEMS technique has many advanges over NDIR(nondispersive) $CO_2$ sensor such as monolithic fabrication, very high selectivity on $CO_2$, low power consumption and compact system. Microbolometer by surface micromachining was fabricated for gas detector and $CO_2$ filter chip by bulk micromachining was fabricated for signal referencing. By using the proposed and fabricated gas sensor, we are expected to measure $CO_2$ concentration more accurately with high reliability.

키워드

참고문헌

  1. Jacquinot, P., Hauser, P., 'Ni(II)cyclam Catalyzed Reduction of $CO_2$-Towards a Voltammetric Sensor for the Gas Phase,' Electroanalysis, v.15 no.18, pp.1437-1444, 2003 https://doi.org/10.1002/elan.200302743
  2. Liu, W.C., Lin, K.W., Chen, H.I, Wang, C.K, Cheng, C.C., Cheng, S.Y., 'new Pt/oxide/$In_{0.49}Ga_{0.51}$ P MOS Schottky diode hydrogen sensor', IEEE electron device letters, v.23 no. 11, pp.640-642, 2002 https://doi.org/10.1109/LED.2002.805006
  3. Frank, J., Meixner, H., 'Sensor system for indoor air monitoring using semiconducting metal oxides and IR-ahsorption', Sensors and actuators. B, Chemical, v.78 no. 1/3, pp.298-302, 2001 https://doi.org/10.1016/S0925-4005(01)00829-2
  4. Breen, T., Butler, N., Kohin, M., Marshall, C.A., Murphy, R., Parker, T., Piscitelli, N. Sil, 'A summary of applications of uncooled microbolometer sensors', Aerospace Conference, 1999. Proceedings. 1999 IEEE, v.3, pp.361-374, 1999 https://doi.org/10.1109/AERO.1999.789796
  5. Kim, K.T., Park, J.Y., Han, Y.H., Kang, H.K., Shin, H.J., Moon, S., Park, J.H., '3D-feed horn antenna-coupled microbolometer' Sensors and actuators. A, Physical, v.110 no. 1/3, pp.196-205, 2004 https://doi.org/10.1016/j.sna.2003.09.018
  6. A. Rogalski, 'Infrared Detecters', Gordonand Breach Science Publishers., 2000
  7. D.K. Cheng, 'Field and Wave Electromagnetics', 2nd ed., p 401, 1989
  8. C. Chen, X. Yi, X. Zhao, B. Xiong, 'Characterizations of VOx-based uncooled microbolometer lineat array', Sensors and Actuator A, Vol. 90, p212, 2001 https://doi.org/10.1016/S0924-4247(01)00495-2