• Title/Summary/Keyword: Surdace Micromachining

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A Fabrication of IR $CO_2$ Sensor based on the MEMS and Characteristic Evaluation (MEMS 기반의 IR $CO_2$ 센서 제작 및 특성 평가)

  • Kim Shin-Keun;Han Yong-Hee;Moon Sung-Wook
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.54 no.5
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    • pp.232-237
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    • 2005
  • In this paper, we fabricated $CO_2$ gas sensor based on the MEMS infrared sensor and characterized its electrical and $CO_2$-sensing properties. The fabricated $CO_2$ gas sensor by MEMS technique has many advanges over NDIR(nondispersive) $CO_2$ sensor such as monolithic fabrication, very high selectivity on $CO_2$, low power consumption and compact system. Microbolometer by surface micromachining was fabricated for gas detector and $CO_2$ filter chip by bulk micromachining was fabricated for signal referencing. By using the proposed and fabricated gas sensor, we are expected to measure $CO_2$ concentration more accurately with high reliability.