Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Fabrication of the SnO2 thin-film gas sensors using an R.F. magnetron sputtering method and their alcohol gas-sensing characterization

R.F. Magnetron Sputtering 법을 이용한 SnO2 박막 센서의 제조 및 알콜 감도 특성

  • Park, Sang-Hyoun (Department of Materials Science and Engineering, University of Seoul) ;
  • Kang, Ju-Hyun (Department of Materials Science and Engineering, University of Seoul) ;
  • Yoo, Kwang-Soo (Department of Materials Science and Engineering, University of Seoul)
  • 박상현 (서울시립대학교 신소재공학과) ;
  • 강주현 (서울시립대학교 신소재공학과) ;
  • 유광수 (서울시립대학교 신소재공학과)
  • Published : 2005.03.30
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Abstract

The nano-grained Pd or Pt-doped $SnO_{2}$ thin films were deposited on the alumina substrate at ambient temperature or $300^{\circ}C$ by using an R.F. magnetron sputtering system and then annealed at $650^{\cir}C$ for 1 hour or 4 hours in air. The crystallinity and microstructure of the annealed films were analyzed. A grain size of the thin films was 30 nm to 50 nm. As a result of gas sensitivity measurements to an alcohol vapor of $36^{\circ}C$, the 2 wt.% Pt-doped $SnO_{2}$ thin-film sensor deposited at $300^{\circ}C$ and annealed at $650^{\circ}C$ for 4 hours showed the highest sensitivity.

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References

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