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http://dx.doi.org/10.5369/JSST.2005.14.2.063

Fabrication of the SnO2 thin-film gas sensors using an R.F. magnetron sputtering method and their alcohol gas-sensing characterization  

Park, Sang-Hyoun (Department of Materials Science and Engineering, University of Seoul)
Kang, Ju-Hyun (Department of Materials Science and Engineering, University of Seoul)
Yoo, Kwang-Soo (Department of Materials Science and Engineering, University of Seoul)
Publication Information
Journal of Sensor Science and Technology / v.14, no.2, 2005 , pp. 63-68 More about this Journal
Abstract
The nano-grained Pd or Pt-doped $SnO_{2}$ thin films were deposited on the alumina substrate at ambient temperature or $300^{\circ}C$ by using an R.F. magnetron sputtering system and then annealed at $650^{\cir}C$ for 1 hour or 4 hours in air. The crystallinity and microstructure of the annealed films were analyzed. A grain size of the thin films was 30 nm to 50 nm. As a result of gas sensitivity measurements to an alcohol vapor of $36^{\circ}C$, the 2 wt.% Pt-doped $SnO_{2}$ thin-film sensor deposited at $300^{\circ}C$ and annealed at $650^{\circ}C$ for 4 hours showed the highest sensitivity.
Keywords
R.F. magnetron sputtering method$SnO_{2}$ thin films; Alcohol sensors;
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Times Cited By KSCI : 2  (Citation Analysis)
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