Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Humidity sensing properties of carbon nitride film according to fabrication conditions

제조 조건에 따른 질화탄소막의 습도 감지 특성

  • Lee, Sung-Pil (Department of Electronic and Electrical Engineering, Kyungnam university) ;
  • Kim, Jung-Hoon (Department of Electronic and Electrical Engineering, Kyungnam university) ;
  • Lee, Hyo-Ung (Department of Electronic and Electrical Engineering, Kyungnam university) ;
  • Lee, Ji-Gong (Department of Electronic and Electrical Engineering, Kyungnam university)
  • 이성필 (경남대학교 전자전기공학부) ;
  • 김정훈 (경남대학교 전자전기공학부) ;
  • 이효웅 (경남대학교 전자전기공학부) ;
  • 이지공 (경남대학교 전자전기공학부)
  • Published : 2005.09.30
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Abstract

Carbon nitride films were deposited on various substrates for humidity sensors with meshed electrode by reactive RF magnetron sputtering system. As the ratio of injected nitrogen was decreased, the sensitivity of sensor was increased. When the ratio of injected nitrogen was $50{\sim}70%$, the sample showed the best linearity. The sensor impedance changed from $95.4{\;}k{\Omega}$ to $2.1{\;}k{\Omega}$ in a relative humidity range of 5 % to 95 %. The humidity sensors based on silicon wafer revealed higher lineality and faster response than those of alumina or quartz substrates. The adsorption saturation time of the sample was about 80 sec, and its desorption time was about 90 sec.

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References

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