Transactions of the Korean Society for Noise and Vibration Engineering (한국소음진동공학회논문집)

The Korean Society for Noise and Vibration Engineering (한국소음진동공학회)
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Dynamic Analysis of Micro Cantilever Beams Undertaking Electrostatic Forces

정전기력을 받는 마이크로 외팔보의 동적 해석

  • 정강식 (한양대학교 대학원 기계설계학과) ;
  • 문승재 (한양대학교 기계공학부) ;
  • 유홍희 (한양대학교 공과대학 기계공학부)
  • Published : 2004.03.01
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Abstract

Static and dynamic responses of micro cantilever beam structures undertaking electrostatic forces are obtained employing Galerkin's method based on Euler beam theory. Variations of static and dynamic responses as well as resonant frequencies are estimated for several sets of beam properties and applied voltages. It is shown that the applied voltage influences the deflection and the modal characteristics significantly. Such information can be usefully employed for the design of MEMS structures.

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References

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