The Transactions of the Korean Institute of Electrical Engineers C (대한전기학회논문지:전기물성ㆍ응용부문C)

The Korean Institute of Electrical Engineers (대한전기학회)
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A Study on the Properties of $SiO_2$ Thin Films using Sol-Gel Method

솔젤벱에 의해 제작된 $SiO_2$ 박막의 물성에 관한 연구

  • Published : 2004.11.01
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Abstract

SiO₂ thin films are fabricated using sol-gel method and dipping method. Gelation time is faster according to increasing the amount of H₂O except H₂O/Si(OC₂H/sub 5/)₄=4. Initial viscosity is highest at H₂O/Si(OC₂H/sub 5/)₄=6. Gelation time is faster according to increasing the amount of CH₃COOH. The relative dielectric constant of thin films decreases a little according to increasing the measuring frequency. The dielectric dissipation factor of thin films increases a little below 100kHz and it increases rapidly over 100kHz.

Keywords

References

  1. M. Jokinen, H. Rahiula, J. B. Rosenholm, T. Peltola and I. Kangasniemi, 'Relation between aggregation and Heterogeneity of Obtained Structure in Sol-Gel Derived CaO-$P_2O_5$-$SiO_2$,' J. Sol-Gel Sci. Tech., 12, pp.159-167, 1998 https://doi.org/10.1023/A:1008642117227
  2. J. Jarzycki, 'Past and Present of Sol-Gel Science and Technology', J. Sol-Gel Sci. Tech., 8, pp. 17-22, 1997 https://doi.org/10.1007/BF02436811
  3. Edited by R. Gerhard-Multhaupt, 'Electrets', Laplacian Press Third Edition in Two Volumes, pp. 1-11, 1998
  4. H. Schmidt, 'New Type of Non-Crystalline Solids between Inorganic and Materials', J. Non-Crystalline Solid, 73, pp. 681-691, 1985 https://doi.org/10.1016/0022-3093(85)90388-6
  5. Hao-Hsin Huang, Bruce Orier and Garth L. Wilkes, 'Hybrid Materials Incorporating Polymeric/Oligomeric Species with Inorganic Glasses by a Sol-Gel Process', Polymer Bulletin, 14, pp. 557-564, 1985 https://doi.org/10.1007/BF00271615
  6. Hao-Hsin Huang, Bruce Orier and Garth L. Wilkes, 'Structure-Property Behavior of New Hybrid Materials Incorporating Oligomeric Species into Sol-Gel Glasses', Macromolecules, 20, pp. 1322-1330, 1987 https://doi.org/10.1021/ma00172a026
  7. T. Adachi and S. Sakka, 'The Role of N-Dimethyl-Formamide, A DCCA, In the Formation of Silica Gel Monoliths by Sol-Gel Method', J. of Non-Cryst, Solids, 99, pp. 118-128, 1988 https://doi.org/10.1016/0022-3093(88)90464-4
  8. Yamane, M., Inoue, S. and Yasumori, A., J. Non-Cryst, Solids, 63, pp. 13-21, 1984 https://doi.org/10.1016/0022-3093(84)90382-X
  9. Brinker, C. J., J. Non-Cryst. Solids, 100, pp. 31-50, 1988 https://doi.org/10.1016/0022-3093(88)90005-1
  10. Pope, E. J. A. and Mackenzie, J. D., J. Non-Cryst. Solids, 87, pp. 185-198, 1986 https://doi.org/10.1016/S0022-3093(86)80078-3
  11. Keefer, K. D., 'Better Ceramic through Chemistry', North-Holland, New York, pp. 15-24, 1984
  12. B. Jaffe, 'Piezoelectric Ceramics', Academic Press, 1971
  13. 桑原 誠, 'セラミシクスの評價法', セラミシクス, 24, 6, p. 566-573, 1989
  14. N. Setter and L. E. Cross, 'The role of B-Site Cation Disorder in Diffuse Phase Transition Behavior of Perovskite Ferroelectrics', J. Appl. Phys., 51, 8, pp. 4356-4360, 1980 https://doi.org/10.1063/1.328296