참고문헌
- Ikuta, K., Hasegawa, T., Adachi, T. and Maruo, S.,'Fluid drive chips containing multiple pump and switching valves for biochemical IC family,' Proc. of MEMS 2000, pp. 739-744, 2000 https://doi.org/10.1109/MEMSYS.2000.838610
- Sato, K., Hibara, A., Tokeshi, M., Hisamoto, H. and Kitamori, T., 'Microchip-based chemical and biochemical analysis systems,' Advanced Drug Delivery Reviews, Vol.55, pp. 379-391, 2003 https://doi.org/10.1016/S0169-409X(02)00225-9
- Bertsch, A., Lorenz, H. and Renaud, P., '3D microfabrication by combining stereolithography and thick resist UV lithography,' Sensors and Actuators, 73, pp. 14-23, 1999 https://doi.org/10.1016/S0924-4247(98)00249-0
- Varadan, V.K., Jiang, X., Varadan, V.V., 'Stereo lithography and other fabrication techniques for 3D MEMS,' John Wiley & Sons Ltd, 2001
- Mizukami, Y., Rajniak, D. and Nishimura, M., 'An integrated micro-electrophoretic process,' Proc. of MEMS 2000, pp. 751-756, 2000 https://doi.org/10.1109/MEMSYS.2000.838612
- Chauang, Yun-Ju, Tseng, Fan-Gang, Cheug, Jeu-Hau and Lin, Wei-Keng, 'A novel fabrication method of embedded micro-channels by using SU-8 thick-film photoresists,' Sensors and Actuators, A103, pp. 64-69, 2003 https://doi.org/10.1016/S0924-4247(02)00325-4
- Seo, H. D., Lee, Y. T., 'Fabrication of the micropump using stereolithography,' Project Report, Ministry of Science & Technology and Ministry of Commerce, Industry and Energy, 2000
- Lee, Y. T., Seo, H. D., 'Fabrication of the micropump using stereolithography,' Journal of the Korean Sensors Society, Vol.10, No.4, pp. 232-238, 2001
- Olsson, A., Stemme, G. and Stemme, E., 'A valveless planar fluid pump with two pump chamber,' Sensors and Actuators, A46-47, pp. 549-556, 1995 https://doi.org/10.1016/0924-4247(94)00960-P
- Lee, Y. T., 'Fabrication of the Liquid Analyzer using Micro-stereolithography Technology,' Journal of the Korean Institute of Electrical and Electronic Material Engineers, Vol.14, No.12, pp. 994-1000, 2001
- Bertsch, A., Heimgartner, S., Cousseau, P. and Rennaud, P., ' 3D micromixer-downscaling large scale industrial static mixer,' Proc. of MEMS 2001, pp. 507-510, 2001 https://doi.org/10.1109/MEMSYS.2001.906590
- Ikuta, K., Ogata, T., Tsuboi, M. and Kojima, S., 'Development of mass productive stereolithography(Mass-IH process),' Proc. of MEMS 96, pp. 301, 1996 https://doi.org/10.1109/MEMSYS.1996.493998
- Jung, D. J., Kim, S. H., Jeong, S. H., 'Shape accuracy and curing characteristics of photopolymer during fabrication of three-dimensional microstructures using microstereolithography,' Journal of the Korean Society of Precision Engineering, Vol.21, No.1, pp. 46-50