Development of Defect Inspection System for PDP ITO Patterned Glass

PDP ITO 패턴유리의 결함 검사시스템 개발

  • 송준엽 (한국기계연구원 지능형정밀기계연구) ;
  • 박화영 (한국기계연구원 지능형정밀기계연구) ;
  • 김현종 (한국기계연구원 지능형정밀기계연구) ;
  • 정연욱 ((주)엔알티 부설연구소)
  • Published : 2004.12.01

Abstract

The formation degree of sustain (ITO pattern) decides quality of PDP (Plasma Display Panel). For this reason, it makes efforts in searching defects more than 30 un as 100%. Now, the existing inspection is dependent upon naked eye or microscope in off-line PDP manufacturing process. In this study developed prototype inspection system of PDP 170 glass is based on line-scan mechanism. Developed system creates information that detects and sorts kinds of defect automatically. Designed inspection technology adopts multi-vision method by slip-beam formation for the minimum of inspection time and detection algorithm is embodied in detection ability of developed system. Designed algorithm had to make good use of kernel matrix that draws up an approach to geometry. A characteristic of defects, as pin hole, substance, protrusion, are extracted from blob analysis method. Defects, as open, short, spots and et al, are distinguished by line type inspection algorithm. In experiment, we could have ensured ability of inspection that can be detected with reliability of up to 95% in about 60 seconds.

Keywords

References

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