Transactions on Electrical and Electronic Materials

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Analysis of Ozone Concentration by TD and Q-mass Method

  • Lee, Dong-Gyu (Department of Electrical Engineering, Kwangwoon University) ;
  • Lee, Joon-Ung (Department of Electrical Engineering, Kwangwoon University)
  • Published : 2004.08.01
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Abstract

In order to get oxidizing power enough for growth of a superconductive thin film with oxide gas, concentrated ozone was used. As a method for concentrating ozone, a method for concentrating ozone by adsorbing ozone selectively into silica-gel beads is adopted, and this concentration is analyzed by the ultraviolet absorption method, the thermal decomposition method and the Q-mass analyzing method. Thermal decomposition method is most effective for measurement of a high concentration of ozone. Ozone as concentrated by the adsorption method got to have a concentration of 97 mol % at the maximum, and it was identified that the concentration of the ozone gas was stable for the time while a thin film was formed.

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References

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