대한기계학회논문집A (Transactions of the Korean Society of Mechanical Engineers A)

  • 제28권5호
  • /
  • Pages.624-631
  • /
  • 2004
  • /
  • 1226-4873(pISSN)
  • /
  • 2288-5226(eISSN)
대한기계학회 (The Korean Society of Mechanical Engineers)
권호 표지
DOI QR코드

DOI QR Code

Bi-Sn 합금을 이용한 3차원 미세 구조물의 제작기술 개발

Fabrication of Real 3D Shape Components Using Bi-Sn Alloys

  • 정성일 (LG생산기술원 자동화기술그룹) ;
  • 박선준 (부산대학교 정밀기계공학과) ;
  • 임용관 (부산대학교 정밀기계공학과) ;
  • 최재영 (부산대학교 정밀기계공학과) ;
  • 정해도 (부산대학교 정밀정형 및 금형가공연구소)
  • 발행 : 2004.05.01
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

In this paper, new replication techniques fur a metal microcomponent having a real 3D shape were introduced. Helical gear was selected as one of a real 3D microcomponents for this study. The helical gear, which was made of photo-curable resin, was fabricated as a master pattern by microstereolithography technology. Then, a silicone rubber mold was fabricated from the master pattern. Lastly, a final bismuth alloy pattern was transferred from the silicone rubber mold by the microcasting process. In this paper, the replication technique is described in detail from the master pattern to the final pattern with some investigation on factors related to the technique.

키워드

참고문헌

  1. Bustillo, J.M., Howe, R.T., and Muller, R.S., 1998, 'Surface Micromaching for Microelectromechanical Systems,' Proceedings of the IEEE Vol. 86, No. 8, pp. 1552-1574 https://doi.org/10.1109/5.704260
  2. Zhang, J., Tan, K.L., and Gong, H.Q., 2001, 'Characterization of the Polymerization of SU-8 Photoresist and Its Applications in MEMS,' Polymer test, Vol. 20, pp. 693-701 https://doi.org/10.1016/S0142-9418(01)00005-8
  3. Yamaguchi, K., 2003, 'Generation of Three Dimensional Microstructure by Metal Jet,' Microsystem Technology, Vol. 9, pp. 215-219 https://doi.org/10.1007/s00542-002-0243-1
  4. Ikuta, K., and Hirowatari, K., 1993, 'Real Three-Dimensional Micro Fabrication Using Stereolithography and Metal Forming,' Proc. of IEEE International Workshop on MEMS 93, pp. 42-47 https://doi.org/10.1109/MEMSYS.1993.296949
  5. Gindl, M., Shin, Gindl, W. Reiterer, A. and Tschegg, S. 2001, 'A Comparison of Different Methods to Calculate the Surface Free Energy of Wood Using Contact Angle Measurements,' Colloids and Surfaces A: Physicochem. Eng. Aspects, Vo.l 181, pp. 279-287 https://doi.org/10.1016/S0927-7757(00)00795-0
  6. Richard, G.J., Wataru, A., and Julian, C., 2000, 'Silicon-Containing Polymers,' Kluwer Academic Publishers, Dordrecht, The Netherlands pp.185-212
  7. Chung, S., Im, Y., Kim, H., Choi, J., and Jeong, H., 2003, 'Development of Micromolding Technology Using Silicone Rubber Mold,' Transactions of the KSME, A, Vol 27, NO. 8, pp. 1380-1387 https://doi.org/10.3795/KSME-A.2003.27.8.1380
  8. Lee, B., Oh, C., and Shim, J., 1996, 'Thermodynamic Assessments of the Sn-In and Sn-Bi Binary Systems,' J. Electron. Mater. Vol. 25, pp. 983-991 https://doi.org/10.1007/BF02666734