Transactions of the Korean Society of Mechanical Engineers A (대한기계학회논문집A)

The Korean Society of Mechanical Engineers (대한기계학회)
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Fabrication of a PDMS (Poly-Dimethylsiloxane) Stamp Using Nano-Replication Printing Process

나노 복화(複畵)공정을 이용한 PDMS 스탬프 제작

  • 박상후 (한국과학기술원 대학원 기계공학과) ;
  • 임태우 (한국과학기술원 대학원 기계공학) ;
  • 양동열 (한국과학기술원 기계공학과) ;
  • 공홍진 (한국과학기술원 물리학)
  • Published : 2004.07.01
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Abstract

A new stamp fabrication technique for the soft lithography has been developed in the range of several microns by means of a nano-replication printing (nRP) process. In the nRP process, a figure or a pattern can be replicated directly from a two-tone bitmap figure with nano-scale details. A photopolymerizable resin was polymerized by the two-photon absorption which was induced by a femtosecond laser. After the polymerization of master patterns, a gold metal layer (about 30 ㎚ thickness) was deposited on the fabricated master patterns for the purpose of preventing a join between the patterns and the PDMS, then the master patterns were transferred in order to fabricate a stamp by using the PDMS (poly-dimethylsiloxane). In the transferring process, a few of gold particles, which were isolated from the master patterns, remained on the PDMS stamp. A gold selective etchant, the potassium iodine (KI) was employed to remove the needless gold particles without any damage to the PDMS stamp. Through this work, the effectiveness of the nRP process with the PDMS molding was evaluated to make the PDMS stamp with the resolution of around 200 ㎚.

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References

  1. Chou,S.Y., Keimel. C. and Gu, J., 2002, 'Ultrafast and Direct Imprint of Nanostructures in Silicon,' Nature, vol.417, no.20, pp.835-837 https://doi.org/10.1038/nature00792
  2. Xia, Y. and Whitesides, G.M., 1998, 'Soft Lithography,' Angew. Chern. Int. Ed, vol.37, pp.550-575 https://doi.org/10.1002/(SICI)1521-3773(19980316)37:5<550::AID-ANIE550>3.0.CO;2-G
  3. Loo, Y.L., Lang, D.Y., Rogers, J.A. and Hsu, J.W.P., 2003, 'Electrical Contacts to Molecular Layers by Nanotransfer Printing,' Nano Letters, vol.3, no.7, pp.913-917 https://doi.org/10.1021/nl034207c
  4. Kim, C.S., Shtein, M. and Forrest, S.R., 2002, 'Nanolithography Based on Patterned Metal Transfer and Its Application to Organic Electronic Devices,' Appl. Phy. Letters, vol.80, no.21, pp.4051-4053 https://doi.org/10.1063/1.1481980
  5. Odem, T.W., Love, J.C., Wolfe, D.B., Paul, K.E. and Whitesides, G.M., 2002, 'Improved Pattern Transfer in Soft Lithography Using Composite Stamps,' Langmuir vol.18, pp.5314-5320 https://doi.org/10.1021/la020169l
  6. Schmid, H., Wolf, H., Allenspach, R., Riel, H., Karg, S., Michel, B. and Delamarche, E., 2003, 'Preparation of Metallic Films on Elastomeric Stamps and Their Application for Contact Processing and Contact Printing,' Adv. Funct. Mater., vol.13, no.2, pp.145-153 https://doi.org/10.1002/adfm.200390021
  7. Park, S.H., Lim, T.W., Yang, D.Y., Yi, S.W. and Kong, H.J., 2003, 'Development of a Nano Replication Printing(nRP) Process Using a Voxel matrix scanning scheme,' The KSPE Autumn Meeting, pp.424-427
  8. Sun, H.B., Maeda, M., Takada, K., Chon, J.W.M., Gu, M. and Kawata, S., 2003, 'Experimental Investigation of Single Voxels for Laser Nanofabrication Via Two-Photon Photopolymerization,' Appl. Phys. Letters, vol.83, no.5, pp.819-821 https://doi.org/10.1063/1.1598293
  9. Kawata, S., Sun, H.B., Tanaka, T. and Takada, K., 2001, 'Finer Features for Functional Microdevices,' Nature, vol.412, no.16, pp.697-698 https://doi.org/10.1038/35089130
  10. Serbin, J., Egbert, A., Ostendorf, A. and Chichkov, B.N., 2003, 'Femtosecond Laser-Induced Two-Photon Polymerization of Inorganic-Organic Hybrid Materials for Applications in Photonics,' Optics letters, vol.28, no.5, pp.301-303 https://doi.org/10.1364/OL.28.000301
  11. Maruo, S. and Kawata, S., 1998, 'Two-Photon-Absorbed near-Infrared Photopolymerization for Three-Dimensional Microfabrication,' J. of Microelectromechanical Systems, vol.7, no.4, pp.411-415 https://doi.org/10.1109/84.735349
  12. Sun, H.B., Tanaka, T. and Kawata, S., 2002, 'Three-Dimensional Focal Spots Related to Two-Photon Excitation,' Appl. Physics letters, vol.80, no.20, pp.3673-3675 https://doi.org/10.1063/1.1478128
  13. Yi, S.W., Lee, S.K., Kong, H.J., Yang, D.Y., Park, S.H. and Lim, T.W., 'Three-Dimensional Micro-Fabrication Using Two-Photon Absorption by Femtosecond Laser,' Proceedings of SPIE, vo1.5342, pp.137-145, 2004 https://doi.org/10.1117/12.524310
  14. Park, S.H., Lim, T.W., Jeong, C.G., Yang, D.Y., Yi, S.W., Lee, S.K. and Kong, H.J., 'Fundamental Process Development of a Ultramicro-Stereolithography Using a Femto-Second Laser for Manufacturing Nano-Scaled Features,' J. of KSPE, vol.21, no.3, pp.180-187, 2004