References
- Y. T. Cheng, W. T Hsu, L. Lin, Nguyen, and K. Najafi, 'Vacuum packaging technology using localized aluminumlsilicon-to-glass bonding', Proc. i4th iEEE into Conl MEMS, pp. 18-21, 2001
- M. Dokmeci and K. Najafi, 'A high-sensitivity polyimide capacitive relative humidity sensor for monitoring anodically bonded hermetic micropackages', J. MEMS, vol. 10, iss. 2, pp. 197-204, 2001 https://doi.org/10.1109/84.925735
- C. Laville and C. Pellet, 'Comparison of three humidity sensors for a pulmonary function diagno sis microsystem", IEEE J. Sensors, vol. 2, no. 2, pp. 96-101, 2002 https://doi.org/10.1109/JSEN.2002.1000249
- E. Franca, 'A CMOS humidity sensor with on-chip calibration', Sens. Act. A, vol. 92, pp. 80-87, 2001 https://doi.org/10.1016/S0924-4247(01)00543-X
- D. D. Denton, C. N. Ho, and S. G. He, 'A solidstate relative humidity measurement system', IEEE Trans. Instr. and Meas., vol. 39, no. 3, pp. 508-511, 1990 https://doi.org/10.1109/19.106282
- G. Maier, 'Low dielectric constant polymers for microelectronics', Prog. Polym. Sci., vol. 26, pp. 365, 2001
- J. O. Simpson and A. K. St. Clair, 'Fundamental insight on developing low dielectric constant polyimides', NASA Tech. Report, no. 294, 1997
- Y. J. Kim and M. G. Allen, 'Surface micromachined solenoid inductors for high frequency applications', IEEE Trans. CPMT, vol. 21, no. 1, pp. 26-33, 1998
- C. H. Ahn, Y. J. Kim, and M. G. Allen, 'A planar variable reluctance magnetic micromotor with fully integrated stator and coils', J. MEMS, vol. 2, no. 4, pp. 165-173, 1993 https://doi.org/10.1109/84.273093
- H. Han, H. Chung, C. C. Gryte, T. J. Shin, and M. Ree, 'Effects of precursor origins on water sorption behaviors of various aromatic polyimides in thin films', Polym., vol. 40, pp. 2681-2685, 1999 https://doi.org/10.1016/S0032-3861(98)00481-9
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