한국진공학회지 (Journal of the Korean Vacuum Society)

한국진공학회 (The Korean Vacuum Society)
권호 표지

Varification of Phase Defect Correctability of Nano-structured Multilayer for EUV Reflection

  • Lee, Seung-Yoon (Division of Materials Science and Engineering, Hanyang University) ;
  • Kim, Tae-Geun (Division of Materials Science and Engineering, Hanyang University) ;
  • Jinho Ahn (Division of Materials Science and Engineering, Hanyang University)
  • 발행 : 2003.10.01
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초록

Ru interfacial layer was inserted into Mo-on-Si interface to enhance the extreme ultra-violet (EUV) reflective multilayer properties. The stacking status and optical properties are analyzed using cross-sectional transmission electron microscope (TEM), and reflectometer. About 1.5% of maximum reflectivity can be acquired as predicted in optical simulation, which is thought to be originated from the diffusion inhibition property. Phase defect correctability of the multilayer can be enhanced by the insertion of Ru barrier layer.

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참고문헌

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