[KSCI] Korea Science Citation Index Service

Varification of Phase Defect Correctability of Nano-structured Multilayer for EUV Reflection

Lee, Seung-Yoon (Division of Materials Science and Engineering, Hanyang University)
Kim, Tae-Geun (Division of Materials Science and Engineering, Hanyang University)
Jinho Ahn (Division of Materials Science and Engineering, Hanyang University)

Publication Information

Journal of the Korean Vacuum Society / v.12, no.S1, 2003 , pp. 40-45 More about this Journal

Abstract

Ru interfacial layer was inserted into Mo-on-Si interface to enhance the extreme ultra-violet (EUV) reflective multilayer properties. The stacking status and optical properties are analyzed using cross-sectional transmission electron microscope (TEM), and reflectometer. About 1.5% of maximum reflectivity can be acquired as predicted in optical simulation, which is thought to be originated from the diffusion inhibition property. Phase defect correctability of the multilayer can be enhanced by the insertion of Ru barrier layer.

Keywords

EUVL; multilayer; Mo/Si; barrier layer; reflectivity; Phase defect; correction;

Citations & Related Records

Reference

1	J. P. Silverman, J. Vac. Sci. Technol. B 15, 2117 (1997) DOI ScienceOn
2	L. R. Harriot, J. Vac. Sci. Technol. B 15, 2130 (1997) DOI ScienceOn
3	S. Y. Lee, S. M. Hur, H. J. Kim, C. S. Yoon, Y. T. Lee, I. Y. Kang, Y.-C. Chung, M. Yi, C. K Ok, O. Kim, and J. Ahn, Jpn. J. Appl. Phys. 41, 4086 (2002) DOI
4	D. W. Sweeney, Danid Stearns, and Paul Mirkarimi, 3rd Int. Work. on EUVL, Matsue, Japan, 38, (2001)
5	St. Braun, H. Mai, M. Moss, R. Scholz, and A. Leson, Jpn. J. Appl. Phys. 41, 4074, (2002) DOI
6	S. D. Berger, J. M. Gibson, R. M. Camarda, R. C. Farrow, H. A. Huggins, J. S. Kraus, and J. A. Liddle, J. Vac. Sci. Technol. B 9, 2996 (1991) DOI
7	C. Montcalm, S. Bajt, P. B. Mirkarimi, E. Spiller, F. J. Weber, and J. A. Folta, Proc. of SPIE 3331 (1998) 42 DOI
8	C. M. Park, T. H. Lee, J. N. Cheon, S. Y. Lee Y. D. Kim, and J. Ahn, J. Korea Phys. Soc. 40, 156 (2002)
9	K. S. Kim, S. Y. Lee, C. M. Park, and J. Ahn, J Korea Phys. Soc. 37, 1067 (2000) DOI ScienceOn
10	Y. J. Lee, W. J. Lee, K. J. Chun, J. Korea Phys. Soc. 40, 720 (2002) DOI ScienceOn