대한전기학회논문지:전기물성ㆍ응용부문C (The Transactions of the Korean Institute of Electrical Engineers C)

대한전기학회 (The Korean Institute of Electrical Engineers)
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FCVA 방법으로 증착된 DLC 박막의 열처리에 따른 구조적 물성 분석

Effects of Thermal Treatment on Structural Properties of DLC Films Deposited by FCVA Method

  • 김영도 (한양대 전자전기제어계측공학과) ;
  • 장석모 (한양대 전자전기제어계측공학과) ;
  • 박창균 (한양대 전자전기제어계측공학과) ;
  • 엄현석 (한양대 전자전기제어계측공학과) ;
  • 박진석 (한양대 전자컴퓨터공학부)
  • 발행 : 2003.08.01
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초록

Effects of thermal treatment on the structural properties of diamond-like carbon (DU) films were examined. The DLC films were deposited by using a modified filtered cathodic vacuum arc (FCVA) deposition system and by varying the negative substrate bias voltage, deposition time, and nitrogen flow rate. Thermal treatment on DLC films was performed using a rapid thermal annealing (RTA) process at $600^{\circ}C$ for 2min. Raman spectroscopy, x-ray photoemission spectroscopy (XPS), atomic force microscope (AFM), and surface profiler were used to characterize the I$_{D}$I$_{G}$ intensity ratio, sp$^3$ hybrid carbon fraction, internal stress, and surface roughness. It was found for all the deposited DLC films that the RTA-treatment results in the release of internal compressive stress, while at the same time it leds to the decrease of sp$^3$ fraction and the increase of I$_{D}$I$_{G}$ intensity ratio. It was also suggested that the thermal treatment effect on the structural property of DLC films strongly depends on the diamond-like nature (i.e., sp$^3$ fraction) of as-deposited film.ed film.

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참고문헌

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