The Transactions of the Korean Institute of Electrical Engineers C (대한전기학회논문지:전기물성ㆍ응용부문C)

The Korean Institute of Electrical Engineers (대한전기학회)
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Effects of Thermal Treatment on Structural Properties of DLC Films Deposited by FCVA Method

FCVA 방법으로 증착된 DLC 박막의 열처리에 따른 구조적 물성 분석

  • 김영도 (한양대 전자전기제어계측공학과) ;
  • 장석모 (한양대 전자전기제어계측공학과) ;
  • 박창균 (한양대 전자전기제어계측공학과) ;
  • 엄현석 (한양대 전자전기제어계측공학과) ;
  • 박진석 (한양대 전자컴퓨터공학부)
  • Published : 2003.08.01
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Abstract

Effects of thermal treatment on the structural properties of diamond-like carbon (DU) films were examined. The DLC films were deposited by using a modified filtered cathodic vacuum arc (FCVA) deposition system and by varying the negative substrate bias voltage, deposition time, and nitrogen flow rate. Thermal treatment on DLC films was performed using a rapid thermal annealing (RTA) process at $600^{\circ}C$ for 2min. Raman spectroscopy, x-ray photoemission spectroscopy (XPS), atomic force microscope (AFM), and surface profiler were used to characterize the I$_{D}$I$_{G}$ intensity ratio, sp$^3$ hybrid carbon fraction, internal stress, and surface roughness. It was found for all the deposited DLC films that the RTA-treatment results in the release of internal compressive stress, while at the same time it leds to the decrease of sp$^3$ fraction and the increase of I$_{D}$I$_{G}$ intensity ratio. It was also suggested that the thermal treatment effect on the structural property of DLC films strongly depends on the diamond-like nature (i.e., sp$^3$ fraction) of as-deposited film.ed film.

Keywords

References

  1. R. L. Boxman, V. Zhitomirskym B. Alterkop, E. Gidalevich, I. Beilis, M. Keidar, and S. Goldsmith, 'Recent progress in filtered vacuum arc deposition', J. Surf. Coat. Technol, 86, pp.243-253, 1996 https://doi.org/10.1016/S0257-8972(96)03023-X
  2. J. S. Chen, S.P. Lau, G.Y. Chen, Z. Sun, Y.J. Li, B.K. Tay, J.W. Chai, 'Deposition of iron containing amorphous carbon films by filtered cathodic vacuum arc technique', Diamond Relat. Mater., 10, pp.2018-2023, 2001 https://doi.org/10.1016/S0925-9635(01)00474-5
  3. B. K. Tay, 'Stress relief of tetrahedral amorphous carbon films by postdeposition thermal annealing', J. Surf. Coat. Technol., 120, pp.448-452, 1999 https://doi.org/10.1016/S0257-8972(99)00465-X
  4. 박창균, 엄현석, 서수형, 박진석, '거울형 자계구조를 갖 는 진공여과 아크증착법을 이용한 다이아몬드상 탄소 박막의 증착 및 물성분석', 대한전기학회 하계학술대 회 ,C권, pp.1717-1719, 2000
  5. L.S Pan and D.R Kania, 'Diamond: Electronic properties and applications', Kluwer Academic Publishers, pp.201, 1995
  6. B.K.Tay, S. Xu, H.S. Tan, L. Zhang, Y.Q. Tu, 'Properties of carbon ion deposited tetrahedral amorphous carbon films as a function of ion energy', J. Appl. Phys. 79(9), pp.7234-7240, 1996 https://doi.org/10.1063/1.361440
  7. E.Liu, X. Shi, B.K. Tay, L.K. Cheah, H.S. Tan, J.R. Shi, Z. Sun, 'Micro-Raman spectroscopic analysis of tetrahedral amorphous carbon films deposited under varying conditions', J. Appl. Phys., 86(11), pp.6078-6083, 1999 https://doi.org/10.1063/1.371657
  8. B.K Tay, X. Shi, H.S Yang, and Z. Sun, 'Raman studies of tetrahedral amorphous carbon films deposited by filtered cathodic vacuum arc', Sur. Coat. Technol., 105, pp.155-158, 1998 https://doi.org/10.1016/S0257-8972(98)00475-7
  9. B.K. Tay, X. Shi, H.S. Tan, and D.H.C Chua, 'Investigation of Tetrahedral Amorphous Caron Films Using X-ray Photoelectron and Raman Spectroscopy', Surf. Interface Anal., 28, pp.231-234, 1999 https://doi.org/10.1002/(SICI)1096-9918(199908)28:1<231::AID-SIA583>3.0.CO;2-3
  10. J.Robertson, S.R.P. Silva, G.A.J. Amaratunga, B. Rafferty, L.M. Brown, J. Schwan, D.F. Frances chini, G. Mariotto, 'Nitrogen modification of hydrogenated amorphous carbon films', Diamond Relat. Mater., 81(6), pp.2626-2634, 1997 https://doi.org/10.1063/1.363927
  11. X. Shi, H. Fu, J.R. Shi, L.K. Cheah, B.K. Tay, P. Hui, 'Electronic transport properties of nitrogen doped amorphous carbon films deposited filtered cathodic vacuum arc technique', J. Phys, Cond. Matter, 10, pp.9293-9302, 1998 https://doi.org/10.1088/0953-8984/10/41/011
  12. J. Robertson,''Deposition mechanisms for promoting sp3 bonding in diamond-like carbon', Diamond and Relat. Mater., 2, pp.984-989, 1993 https://doi.org/10.1016/0925-9635(93)90262-Z