한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제20권4호
  • /
  • Pages.76-83
  • /
  • 2003
  • /
  • 1225-9071(pISSN)
  • /
  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

평면 스테이지의 이동자 접촉 배제를 위한 반발식/흡인식 자기 부상

Repulsive & Attractive Type Magnetic Levitation for Mechanical Isolation of the Planar Stage Mover

  • 정광석 (국립 충주대학교 기계공학과) ;
  • 이상헌 (연세대학교 기계공학과 대학원) ;
  • 백윤수 (연세대학교 기계전자공학부)
  • 발행 : 2003.04.01
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

To cope with stringent performance targets requested in many fields spanning the whole range of industry, the driver is necessary to realize large dynamic range as well as nano resolution, manipulate the mover orientation without additional driver, and be suitable for clean environment. As one of those purposes, authors have developed the planar precision stages with the integrated operating principle of levitation and propel. In this paper, we discuss potential of magnetic suspension technology by comparing various features of non-contact planar stages, that is, repulsive type of surface actuator and attractive type of surface actuator.

키워드

참고문헌

  1. Steve Chen, S. J. and Busch-Vishiniac, I. J., 'A magnetically levitated, automated, contact analytical probe tool,' IEEE Transaction on Semiconductor Manufacturing, Vol. 8, No.1, pp. 72-78,1995 https://doi.org/10.1109/66.350759
  2. Jung, K. S. and Baek, Y. S., 'Design, modeling, and control of a novel six d.o.f positiong system using magnetic levitation,' IEICE Trans. on Electronics, Vol. E83-C, No. 12, pp. 1937-1949, 2001
  3. 정광석, 백윤수, '전자기력 제어를 이용한 6 자유도 초정밀 스테이지,' 한국정밀공학회지, 제 17권, 제 3호, pp. 158-164, 2000
  4. Holmes M., Hocken R. and Trumper D., 'The longrange scanning stage: a novel platform for scannedprobe microscopy,' Precision engineering, Vol. 24, pp. 191-209, 2000 https://doi.org/10.1016/S0141-6359(99)00044-6
  5. Jeong M. C. and Busch-Vishiniac I. J., 'A submicron accuracy magnetic levitation micromachine with endpoint friction,' Sensors and Actuators, Vol. 29, pp. 225-234, 1991 https://doi.org/10.1016/0924-4247(91)80019-L
  6. Xu, W. and King, T., 'Flexure hinges for piezoactuator displacement amplifiers : flexibility, accuracy, and stress considerations,' Precision engineering, Vol. 19, No.1, pp. 4-10, 1996 https://doi.org/10.1016/0141-6359(95)00056-9
  7. Awabdy, B. A., Shin, W. and Auslander D. M., 'Nanometer positioning of a linear motion stage under static loads,' IEEE/ASME Trans. on Mechatronics, Vol. 3, No.2, pp. 113-119, 1998 https://doi.org/10.1109/3516.686679
  8. Tadokoro S., Murakami T., Fuji S., Kanno R. and Oguro K., 'An elliptic friction drive element using an ICPF actuator,' IEEE Control Systems Magazine, Vol. 17, No.3, pp. 60-68,1997 https://doi.org/10.1109/37.588149
  9. Tomita, Y. and Koyanagawa, Y., 'Study on a surfacemotor driven precise positioning system,' Journal of Dynamic systems, Measurement, and Control, Vol. 117, pp. 311-319,1995 https://doi.org/10.1115/1.2799121
  10. Jung, K. S. and Baek, Y. S., 'Study on a novel contact-free planar moving system using electromagnet and permanent magnet,' IEEE/ASME Trans. on Mechatronics, Vol. 7, No.2, pp. 35-43, 2002 https://doi.org/10.1109/3516.990885
  11. Jung, K. S. and Baek, Y. S., 'Contact-free electromagnetic planar motion system for high precision manipulating in super clean environments,' Proc. of the 32nd ISR (International Symposium on Robotics), Korea, April, pp. 1099-1104, 2001
  12. 정광석, 백윤수, '비접촉 평면 구동기의 자기력 조합 방식 구동 원리,' 한국정밀공학회지, 제 18권 제 3호, pp. 115-121,2001
  13. Jung, K. S. and Baek, Y. S., 'Precision stage using a non-contact planar actuator based on magnetic suspension technology,' Mechatronics (to be published) https://doi.org/10.1016/S0957-4158(03)00011-4
  14. 정광석, 이상헌, 백윤수, '자기 흡인식 부상 원리에 기초한 비접촉식 서피스 액추에이터의 초정밀 범용 스테이지에의 적용 가능성,' 대한기계학회 논문집 A 권, 제 26 권, 제 3 호, pp. 452-460, 2002 https://doi.org/10.3795/KSME-A.2002.26.3.452