$(Sr_{0.9}Ca_{0.1})TiO_{3}$ 세라믹 박막의 열처리온도에 따른 특성

Properties with Annealing Temperature of $(Sr_{0.9}Ca_{0.1})TiO_{3}$ Ceramic Thin Film

  • 발행 : 2002.11.01

초록

The $(Sr_{0.9}Ca_{0.1})TiO_3(SCT)$ thin films were deposited on Pt-coated electrode (Pt/TiN/$SiO_2$/Si) using RF sputtering method. The composition of SCT thin film deposited on Si substrate at room temperature is close to stoichiometry(1.081 in A/B ratio). The maximum dielectric constant of SCT thin film was obtained by ammealing at $600^{\cric}C$. The temperature dependence of dielectric loss showed a value within 0.02 in temperature ranges of -80 ${\sim}$ +90$^{\circ}C$. The capacitance characteristics showed a stable value within ${\pm}$4%. The drastic decrease of dielectric constant and increase of dielectric loss in SCT thin films was observed at the frequency above 200kHz.

키워드

참고문헌

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