대한전자공학회논문지SD (Journal of the Institute of Electronics Engineers of Korea SD)

대한전자공학회 (The Institute of Electronics and Information Engineers)
권호 표지

완전차동용량형 압력센서를 위한 적분형 C-V 변환기

Integral C-V Converter for a Fully Differential Capacitive Pressure Sensor

  • 이대성 (電子部品硏究院, 나노메카트로닉스연구센터) ;
  • 김규철 (檀國大學校 電子컴퓨터工學科) ;
  • 박효덕 (電子部品硏究院, 나노메카트로닉스연구센터)
  • Lee, Dae-Sung (Korea Electronics Technology Institute, Nano-Mechtronics Research Center) ;
  • Kim, Kyu-Chull (Dankook University, Dept. of Electrical, Electronics & Computer Engineering) ;
  • Park, Hyo-Derk (Korea Electronics Technology Institute, Nano-Mechtronics Research Center)
  • 발행 : 2002.09.01
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초록

본 논문에서는 용량형 압력센서의 비선형성 문제를 해결하기 위한 적분형 C-V 변환기를 제안하였다. 이 변환기는 스위치 커패시터 적분기와 스위치 커패시터 차동증폭기로 구성되어 있으며 인가된 압력에 반비례하는 센서용량을 전압으로 변환하여 선형적으로 출력한다. 제안된 적분형 C-V 변환기는 PSPICE 시뮬레이션에서 초기 전극간격의 90%에 해당하는 큰 변위에 대해서 0.01%/FS 이하의 매우 낮은 비선형도와 오프셋 용량 및 기생용량에 둔감한 우수한 특성을 보였다. 또한 센서신호처리의 필수기능인 오프셋 보정 및 이득조정이 적분형 C-V 변환기에서 용이하게 구현됨을 보였다.

An intergral C-V converter is proposed to solve the nonlinearity problem of capacitive pressure sensors. The integral C-V converter consists of a switched-capacitor integrator and a switched-capacitor differential amplifier. It converts the sensor capacitance change which is inversely proportional to an applied pressure into a linear voltage output. Various PSPICE simulations prove that the convertor has excellent characteristics, such as low nonlinearity less than 0.01%/FS and low sensitivity to parallel offset capacitance and parasitic capacitance for the displacement range of sensor diaphragm set to 0 ${\sim}$ 90% of the initial distance between the electrodes in the simulation. We also show that the offset compensation and the gain trimming are easily achieved with the integral C-V converter.

키워드

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