Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Fine Gap Control Using Pneumatic Servo System

공압서보시스템에 의한 미세 간극제어 시스템 설계

  • 김동환 (서울산업대학교 기계설계ㆍ자동화공학부) ;
  • 김영진 (서울산업대학교 기계설계학과 대학원) ;
  • 정대화 (LG 생산기술원 검사기술센터)
  • Published : 2002.12.01
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Abstract

A pneumatic servo system requiring a fine gap control in a photo-electric sensor which is used for a LCD array detection device is introduced. The gap controlled by the pneumatic servo system remains within around 50~80 ${\mu}{\textrm}{m}$, and the system possesses an effect to eliminate undesirable particles on the LCD plate by blowing air out. The air flow rate is initially controlled by a servo valve and expanded by a booster valve, thus the controlled air pressure contributes to maintaining an appropriate gap between the LCD plate and photo-electric sensor An air floating plate of two degrees of freedom is designed and fabricated, and a fine tilting motion control is also implemented by assigning different gap commands. The pressure control and direct gap control are proposed, and each performance is verified experimentally.

Keywords

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