• 한국정밀공학회지
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• 제19권12호
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• pp.45-56
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• 2002

A pneumatic servo system requiring a fine gap control in a photo-electric sensor which is used for a LCD array detection device is introduced. The gap controlled by the pneumatic servo system remains within around 50~80 ${\mu}{\textrm}{m}$, and the system possesses an effect to eliminate undesirable particles on the LCD plate by blowing air out. The air flow rate is initially controlled by a servo valve and expanded by a booster valve, thus the controlled air pressure contributes to maintaining an appropriate gap between the LCD plate and photo-electric sensor An air floating plate of two degrees of freedom is designed and fabricated, and a fine tilting motion control is also implemented by assigning different gap commands. The pressure control and direct gap control are proposed, and each performance is verified experimentally.