Progress in Superconductivity
- 제4권1호
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- Pages.59-63
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- 2002
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- 1229-4764(pISSN)
10-V 조셉슨접합 어레이의 제작 및 특성
Fabrication and Characteristics of 10-V Josephson Junction Array
초록
10-V Josephson junction array arranged in 8 parallel stripline paths was fabricated using self-aligning and reactive ion etching techniques. These techniques were introduced in detail with aim of obtaining high-quality junctions. The array has 18,184 Josephson junctions with the area of