한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제19권11호
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  • Pages.228-233
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  • 2002
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  • 1225-9071(pISSN)
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  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

미세탐침기반 기계-화학적 리소그래피공정에 의한 마이크로/나노패턴 제작

Fabrication ofMicro/Nano-patterns using MC-SPL (Mechano-Chemical Scanning Probe Lithography) Process

  • 성인하 (연세대학교 대학원 기계공학과) ;
  • 김대은 (연세대학교 기계공학부)
  • 발행 : 2002.11.01
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⟨ 이전 논문 다음 논문 ⟩

초록

In this work, a new non-photolithographic micro-fabrication technique is presented. The motivation of this work is to overcome the demerits of the most commonly used photolithographic techniques. The micro-fabrication technique presented in this work is a two-step process which consists of mechanical scribing followed by chemical etching. This method has many advantages over other micro-fabrication techniques since it is simple, cost-effective, rapid, and flexible. Also, the technique can be used to obtain a metal structure which has sub-micrometer width patterns. In this paper, the concept of this method and its application to microsystem technology are described.

키워드

참고문헌

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