참고문헌
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- Hwang, K. H., Choi, Y. J., Min, Y. K., Hae, J. M. and Kim, S. G., 1997, 'Micromachined Thin-Film Mirror Array for Reflective Light Modulation,' Annals of the CIRP Vol. 46, No. 1, pp. 455 -458 https://doi.org/10.1016/S0007-8506(07)60864-6
- Hwang, K. H., Choi, Y. J., Min, Y. K., Bae, J. M. and Kim, S. G., 1997, 'Effect of Anchor Design on the Deflection of Micromachined Cantilever Beams,' Proc. of International Conf. on Micromechatronics for Information and Precision Equipment, Tokyo, pp. 763-766
- Lober, T. A., Huang, J., Schmidt, M. A. and Senturia, S. D., 1988, 'Characterization of the Mechanisms Producing Bending Moments in Polysilicon Micro-Cantilever Beams by Interferometric Deflection Measurements,' IEEE Solid-State Sensor and Actuator Workshop, Hilton Head, SC, Tech. Dig., pp. 92 - 95 https://doi.org/10.1109/SOLSEN.1988.26441
- Tabata, O. and Kawahata, K., 1989, 'Mechanical Property Measurements of Thin Films using Load-deflection of Composite Rectangular Membrane,' IEEE MEMS, Salt Lake City, pp. 152-156