한국표면공학회지 (Journal of the Korean institute of surface engineering)

  • 제35권3호
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  • Pages.121-126
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  • 2002
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  • 1225-8024(pISSN)
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  • 2288-8403(eISSN)
한국표면공학회 (The Korean Institute of Surface Engineering)
권호 표지

WC/C 다층박막의 합성 및 기계적 특성에 관한 연구

A study on the synthesis and mechanical properties of WC/C multilayered films

  • 명현식 (성균관대학교 금속재료공학부 플라즈마 응용 표면기술 연구센터) ;
  • 한전건 (성균관대학교 금속재료공학부 플라즈마 응용 표면기술 연구센터)
  • 발행 : 2002.06.01
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초록

WC/C multilayered films were deposited by arc ion plating and magnetron sputter hybrid system with various $C_2$H$_2$ flow rates and bias voltages. The coatings have been characterized with respect to their chemical composition (Glow Discharge Optical Emission Spectroscopy), hardness(Knoop micro-hardness), residual stress(Laser beam bending) and friction coefficient(Ball on disc type wear test). Deposition rate, microhardness and residual stress of WC/C films were observed to increase with increasing the $C_2$$H_2$ flow rates. The highest hardness and residual stress were measured to be 26.5 GPa and 1.1GPa for, WC/C film deposited at substrate bias of -100V. WC/C multilayered film was obtained very low friction coefficient(~0.1).

키워드

참고문헌

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