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A study on the synthesis and mechanical properties of WC/C multilayered films  

명현식 (성균관대학교 금속재료공학부 플라즈마 응용 표면기술 연구센터)
한전건 (성균관대학교 금속재료공학부 플라즈마 응용 표면기술 연구센터)
Publication Information
Journal of the Korean institute of surface engineering / v.35, no.3, 2002 , pp. 121-126 More about this Journal
Abstract
WC/C multilayered films were deposited by arc ion plating and magnetron sputter hybrid system with various $C_2$H$_2$ flow rates and bias voltages. The coatings have been characterized with respect to their chemical composition (Glow Discharge Optical Emission Spectroscopy), hardness(Knoop micro-hardness), residual stress(Laser beam bending) and friction coefficient(Ball on disc type wear test). Deposition rate, microhardness and residual stress of WC/C films were observed to increase with increasing the $C_2$$H_2$ flow rates. The highest hardness and residual stress were measured to be 26.5 GPa and 1.1GPa for, WC/C film deposited at substrate bias of -100V. WC/C multilayered film was obtained very low friction coefficient(~0.1).
Keywords
WC/C; arc-magnetron hybrid coating; lubrication coating;
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