Analysis on Particle Deposition onto a Heated Rotating Disk with Electrostatic Effect

정전효과가 있는 가열 회전원판으로의 입자침착 해석

  • 유경훈 (한국생산기술연구원에어로졸·필터연구실)
  • Published : 2002.05.01

Abstract

Numerical analysis has been conducted to characterize deposition rates of aerosol particles onto a heated, rotating disk with electrostatic effect under the laminar flow field. The particle transport mechanisms considered were convection, Brownian diffusion, gravitational settling, thermophoresis and electrophoresis. The aerosol particles were assumed to have a Boltzmann charge distribution. The electric potential distribution needed to calculate local electric fields around the disk was calculated from the Laplace equation. The Coulomb, the image, the dielectrophoretic and the dipole-dipole forces acting on a charged particle near the conducting rotating disk were included in the analysis. The averaged particle deposition vetocities and their radial distributions on the upper surface of the disk were calculated from the particle concentration equation in a Eulerian frame of reference, along with a rotation speed of 0∼1,000rpm, a temperature difference of 0∼5K and a charged disk voltage of 0∼1000V.Finally, an approximate deposition velocity model for the rotating disk was suggested. The present numerical results showed relatively good agreement with the results of the present approximate model and the available experimental data.

Keywords

References

  1. J. Electrochem. Soc. v.138 Design and verification of nearly ideal flow and heat transfer in a rotating disk chemical vapor deposition reactor Breiland W.G.;Evans G.H.
  2. J.of Crystal Growth v.132 Numerical modeling of particle dynamics in a rotating disk chemical vapor deposition reactor Davis R.W.;Moore E.F.;Zachariah M.R.
  3. ASME/JSME Thermal Engineering Conference v.2 Numerical computation of the particle deposition onto the rotating and heated circular plate Hirano H.;Ozoe H.
  4. Thin Solid Films v.365 Computational modeling of transport phenomena and detailed chemistry in chemical vapor deposition-a benchmark solution Kleijin C.R.
  5. Transactions of the Korean Society of Mechanical Engineers, B v.22 Particle deposition on a rotating disk in application to vapor deposition process(VAD) Song C.G.;Hwang J.H.
  6. Transactions of the Korean society of Mechanical Engineers, B v.24 no.3 Numerical investigation of contamination particle's trajectory in a head/slider disk interface Park H.S.;Hwang J.H.;Choa S.H.
  7. Proc.of the 34th IES Annual Technical Meeting Electrostatic effects in particle depositon onto product surfaces Fissan H.J.;Turner J.R.
  8. Proc of the 9th International Symposium on Contamination control Aerosol deposition on wafer surface Sakata S.;Inoue M.;Chirifu S.;Yoshida T.;Okada T.
  9. Proc. of the 34th IES Annual Technical Meeting Charge level on aerosol particles:measurement of particle charge and size distribution in disk drive Pui D.Y.H.;Tsai C.-J.;Liu B.Y.H.
  10. Transactions of the Korean Society of Mechanical Engineers, B v.26 no.2 Analysis on particle deposition on a heated rotating disk Yoo K.H.
  11. AIAA J. v.19 no.9 Instability and transition in rotating disk flow Malik M.R.;Wilkinson S.P.;Orszag S.A.
  12. Transactions of the Korean Society of Mechanical Engineers,B v.21 no.10 Analysis on particle deposition onto a heated, horizontal freestanding wafer with electrostatic effect Yoo K.H.;Oh M.D.;Myong H.K.
  13. Aerosol Science and Technology v.11 Predicted deposition of submicrometer particles due to diffusion and electrostatics in viscous axisymmetric stagnation-point flow Cooler D.W.;Peters m.H.;Miller,R.J.
  14. Numerical heat transfer and fluid flow Patankar S.V.
  15. J.Aerosol Science v.20 Numerical solution of aerosol dynamics for simultaneous convection, diffusion and external forces Stratmann F.;Whitby E.R.
  16. Proc.of the 13th International Symposium on Contamination Control Particle deposition velocities on a rotating wafer Ahn K.-H.;Bae G.N.;Lee C.S.
  17. J. Heat Transfer v.107 Local and average heat transfer characteristics for a disk situated perpendicular to a uniform flow Sparrow E.M.;Geiger G.T.
  18. Flow and heat transfer in rotating-disc systems rotor-stator systems Owen J.M.;Rogers R.H.