Transactions of the Korean Society for Noise and Vibration Engineering (한국소음진동공학회논문집)

The Korean Society for Noise and Vibration Engineering (한국소음진동공학회)
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Frequency-shaped Sliding Mode Control of Isolation Table Equipped with Precision devices

정밀기기가 탑재된 방진대의 주파수성형 슬라이딩모드 제어

  • 김효준 (국립삼척대학교 기계공학과) ;
  • 박영필 (연세대학교 기계·전자공학부)
  • Published : 2002.02.01
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Abstract

This paper presents the design of an active vibration suppression controller for an air-spring type vibration isolation table. Firstly, isolation system model is constructed considering the isolation table, attached equipment and voice-coil actuator. An active control system is designed based on frequency-shaped sliding mode control theory rewarding high frequency uncertainties with respect to attached equipments on the isolation table. Finally. the performance of the active isolation system is evaluated by simulation under some disturbance conditions which are transmitted from base structure of the isolation system.

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References

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