한국전기전자재료학회논문지 (Journal of the Korean Institute of Electrical and Electronic Material Engineers)

  • 제14권8호
  • /
  • Pages.658-662
  • /
  • 2001
  • /
  • 1226-7945(pISSN)
  • /
  • 2288-3258(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지

SOI 멤브레인과 트랜치 구조상에 제작된 발열저항체형 마이크로 유량세선의 특성

Characteristics of Hot-Film Type Micro-Flowsensors Fabricated on SOI Membrane and Trench Structures

  • 정귀상 (동서대학교 정보시스템공학부) ;
  • 김미목 (영남대학교 전자공학과) ;
  • 남태철 (영남대학교 전자공학과)
  • 발행 : 2001.08.01
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

This paper describes on the fabrication and characteristics of hot-film type micro-flowsensors integrated with Pt-RTD(resistance thermometer device) and micro-heater on the SOI(Si-on-insulator) membrane and trench structures, in which MGO thin-film was used as medium layer in order to improve adhesion of Pt thin-film to SiO$_2$ layer. Output voltages increased due to increase of heat-loss from sensor to external. The output voltage was 250 nV at N$_2$ flow rate of 2000 sccm/min, heating power of 0.3 W. The response time($\tau$:63%) was about 42 msec when input flow was step-input. The results indicated that micro-flowsensors with the SOI membrane and trench structures have properties of a high-resolution and ow consume power.

키워드

참고문헌

  1. Sensors & Actuators A v.11 A highly sensitive silicon chip microtransducer for air flow and differential pressure alllication R. G. Jonson(et. al.)
  2. Transducers '87 Monolithic Si air flow sensors for low velocity sensing M. Sekimura(et. al.)
  3. Sensors & Actuators v.19 Integrated multi-function sensors for flow velocity temperature and vacuum measurements T. Q. Yi(et. al.)
  4. Sensors & Actuators A v.31 Sensor technology strategy in silicon P. M. Sarro
  5. Sensors & Actuators A v.49 Application of thermal Si sensors on membranes M. A. Gajda(et. al.)
  6. Sensors & Materials v.10 no.5 The fabrication of Pt microheater using aluminum oxide as medium layer and it's characteristics G. S. Chung(et. al.)
  7. J. KIEEME v.13 Fabrication and characteristics of hot-film type micro flowsensors integrated with RTD G. S. Chung(et. al.)
  8. IEEE Electron Device Letters v.13 no.2 Micromachined thermal radiation emitter from a commercial CMOS process M. Parameswaran(et. al.)
  9. IEEE Trans. on Electron Devices v.39 no.6 An integrated mass flow sensor with one-chip CMOS interface ciruitry E. Yoon(et. al.)
  10. Sensors & Actuators B v.26-27 Interated array sensors for detection organic solvants J. W. Garderer(et. al.)
  11. Sensors & Actuators B v.2 A substrate for thin-film gas sensors in microelectronic technology U. Dibbern
  12. J. KIEEME v.14 The fabrication of micro-heaters with low consumption power using SOI and trench structures and its characteristics G. S. Chung(et. al.)
  13. Sensors & Materials v.12 Anisotropic Etching Characteristics of Silicon in TMAH:IPA:Pytazine Solutions G. S. Chung
  14. J. Korean Sensors Society v.9 Fabrication and characteristics of RTD(resistance thermometer device) for micro thermal sensors G. S. Chung(et. al.)
  15. J. KIEEME v.9 Formation of platinum thin-film for RTD temperature sensors G. S. Chung(et. al.)
  16. J. KIEEME v.11 Fabrication of micro-heater flowsensors using membrane structure and its characteristics G. S. Chung(et. al.)