References
- H. Kunzmann, Today's Limits of accuracy in dimensional metology, Proc. of 2nd IMEKO TC14 Int. Symposium on metrology for quality control in production, Beijing, China May, 1989
- B. E. A. Saleh et al., Fundamentals of photics, first Eddition, Wiely Interscience, p65, 1991
- H. Kunzmann et al., Scales va. Laser interferometers performance and comparison of two systems, Ann. CIRP, Vol. 47/2, p753, 1993
- A. Teimel, Technology and application of grating interferometers in high precision measurement, Pro. of the 6th Int. Precision Engineering Seminar, Braunschweig, Germany, p15, 1991
- 엄태봉 외, 3차원 측정 및 레이저응용 측정, 정밀측정교재, 한국표준과학연구원, 1992
- Becker K and Heynacher E, Ahigh resolution coordinate measuring machine for the testing of X-ray mirrors , SPIE vol. 733(Bellingham WA:SPIE), p.149, 1986
- K. Yoshizumi. et al., Ultrahigh accuracy 3-D profilemetry , Appl. Opt. 26, p.1617, 1987
- K. Yoshizumi, et al., Ultrahigh accuracy 3-D profilometer using atomic force probe , National Technical Report, Vol. 39, No. 4, p.116, 1993
- Mahito Negishi et al., A high-prcision coordinate measuring system for super-smooth polishing , Nanotechnology, Vol. 6, p. 139, 1995 https://doi.org/10.1088/0957-4484/6/4/006
- E.C. Teague, The National Institute of Standards and Technology Molecular Measuring Machine Project: Metrology and Precision Engineering Design , J. Vac. Sci. Technol., B7, P.1989, 1989
- Daniel Malacara, 'Optical shop testing', Second Edition, Wiely Interscience
- Chunsheng Huang, 'Propagation error in precision Fizeau interferometry', Appl. Opt. Vol. 32, No. 34, p7016, 1993
- Y. J. Fan, K.G. Struik, P. C. Mulders, C. H. F. Velzel, 'Stitching inteferometry for the CIRP Vol. 46, No. 1, p459 1997 https://doi.org/10.1016/S0007-8506(07)60865-8
- Toyohiko Yatagai, 'Phase measuring Ronchi test', Appl. Opt. 27(3), p523, 1988
- 이호재, 일반화된 론끼법을 이용한 비구면 측정, 박사학위논문, 한국과학기술원, 1999
- D J Whitehouse, Review article: Surface metrology, Meas. Sci. Technol., 8, p955, 1997
- Chin Y. Poon et al., Comparison of surface roughness measurements by stylus, AFM and non-contact optical profiler, Wear, 190, p76, 1995
- T H McWaid et al., Methods divergence between measurements of micrometer and sub-micrometer surface features, Nanotechnology, 5, p33, 1994
- 정명세 외, 표면거칠기, 정밀측정교재, 한국표준연구소, 1984
- J.C.Wyant and Creath, Advances in interferometry optical profiling, Int. Int. J.Mach. Tools. manufact, Vol.1/2, No.5-10, 1992 https://doi.org/10.1016/0890-6955(92)90053-J
- Creath, Phase-measurement interferometry: beware these errors, Proc. SPIE 1553, 1991
- R. Wiesendanger, Scanning Probe Microscopy and Spectroscopy, Cambridge University Press, 1994
- Rebecca Howland et al., A Practical Guide : To scanning probe microscopy, Park Scientific Instruments, 1997