Influence of Ambient Gases on Field Emission Performance in the Frit-sealing Process of Mo-tip Field Emission Display

몰리브덴 팁 전계 방출 표시 소자의 프릿 실링에 있어서 분위기 기체가 전계 방출 성능에 미치는 영향

  • 주병권 (KIST 정보재료.소자연구센터) ;
  • 김훈 (KIST 정보재료.소자연구센터) ;
  • 정재훈 (대우고등기술연구원 전자재료연구실) ;
  • 김봉철 (대우고등기술연구원 전자재료연구실) ;
  • 정성재 (대우고등기술연구원 전자재료연구실) ;
  • 이남양 (대우고등기술연구원 전자재료연구실) ;
  • 이윤희 (KIST 정보재료.소자연구센터) ;
  • 오명환 (KIST 정보재료.소자연구센터)
  • Published : 1999.07.01

Abstract

The influence of ambient gases on field emission performance of Mo-field emitter array(FEA) in the frit-sealing step of field emission display(FED) packaging process was investigated. Mo-tip FEA was mounted on the glass substrate having a surrounded frit(Ferro FX11-137) and fired at $415^{\circ}C$ in the ambient gases of air, $N_2$ and Ar. The Ar gas was proved to be most proper ambient among the used gases through evaluating the turn-on voltage and field emission current of the fired Mo-tip FEA devices. It was confirmed that the Mo surface fired in Ar ambient was less oxidized when compared with another ones annealed in air and Ar ambient by the AFM, XPS, AES and SIMS analysis. Finally, the 3.5 inch-sized Mo-tip FED, which was packaged using frit-sealing process in the Ar ambient, was proposed.

Keywords

References

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