E2M - 전기 전자와 첨단 소재 (Electrical & Electronic Materials)
- 제10권9호
- /
- Pages.938-944
- /
- 1997
- /
- 2982-6268(pISSN)
- /
- 2982-6306(eISSN)
Cu-Ni 박막 스트레인 게이지를 이용한 다이어프램식 압력 센서-I: Cu-Ni 박막 스트레인 게이지 개발
Diaphragm-Type Pressure Sensor with Cu-Ni Thin Film Strain Gauges-I: Development of Cu-Ni Thin Film Strain Gauges
초록
Cu-Ni thin film strain gauges for diaphragm-type pressure sensors were developed. Thin films of Cu-Ni alloys of various compositions were deposited onto glass and stainless steel substrates by RF magnetron sputtering. The effects of composition substrate temperature Ar partial pressure and aging on the electrical properties of Cu-Ni film strain gauges in the thickness range 500~2000