스퍼터링에 의한 CdTe 박막 제조 조건이 CdTe/CdS 태양전지의 특성에 미치는 영향

Effect of Sputtering Conditions for CdTe Thin Films on CdTe/CdS Solar Cell Characteristics

  • 정해원 (인하대학교 전기공학과) ;
  • 이천 (인하대학교 전기공학과) ;
  • 신재혁 (국립기술품질원 무기화학과) ;
  • 신성호 (국립기술품질원 무기화학과) ;
  • 박광자 (국립기술품질원 무기화학과)
  • 발행 : 1997.11.01

초록

Polycrystalline CdTe thin films have been studied for photovoltaic application because of their high absorption coefficient and optimal band energy(1.45 eV) for solar energy conversion. In this study CdTe thin films were deposited on CdS(chemical bath deposition)/ITO(indium tin oxide) substrate by rf-magnetron sputtering under various conditions. Structural optical and electrical properties are investigated with XRD UV-Visible spectrophotometer SEM and solar simulator respectively. The fabricated CdTe/CdS solar cell exhibited open circuit voltage( $V_{oc}$ ) of 610 mV short circuit current density( $J_{sc}$ ) of 17.2 mA/c $m^2$and conversion efficiency of about 5% at optimal sputtering conditions.

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